Quartz Reactor Casing Assembly with Flanges for Epitaxial Cooling
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Solution Overview
Problem
The existing method of welding concentric quartz tubes for reaction chamber enclosures in epitaxial deposition is unreliable, leading to structural damage and high manufacturing costs due to artisanal processes with unpredictable yield.
Innovation Solution
A casing assembly comprising a quartz inner and outer casing connected by flanges with integrated cooling fluid inlets and outlets, using diffusion welding for assembly, and O-rings for sealing, to ensure a liquid-tight interspace for efficient cooling and mechanical stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If welding is used to join concentric quartz tubes, then the enclosure can be formed, but the tubes are irreparably damaged and manufacturing costs increase
Solution Approach 1:
The enclosure is divided into separate inner and outer quartz tubes that are joined through a flange assembly rather than direct welding. This segmentation allows each tube to remain intact while being connected through a modular flange structure with O-rings, eliminating the need for destructive welding operations on the tubes themselves.
Solution Approach 2:
A flange assembly acts as an intermediary component between the inner and outer quartz tubes. The flange provides a connection interface that joins the tubes without requiring direct welding between them, thereby preserving the structural integrity of the tubes while still forming a sealed enclosure.
2Ease of manufacture
If artisanal welding processes are used, then the tubes can be joined, but the yield becomes unpredictable and costs increase
Solution Approach 1:
The artisanal welding process is replaced with a mechanical connection system using flanges and O-rings. This substitution transforms the joining process from a skilled manual welding operation to a standardized mechanical assembly process, improving reproducibility and manufacturing yield.
Solution Approach 2:
The joining method transitions from thermal welding processes to mechanical sealing processes. This parameter change in the joining mechanism leads to more consistent and predictable manufacturing outcomes, as mechanical assembly is more reproducible than artisanal welding.
3Temperature
If quartz tubes are used for the enclosure, then they can withstand high temperatures, but they require complex welding to join
Solution Approach 1:
The enclosure is segmented into separate inner and outer quartz tubes connected through a flange assembly. This segmentation simplifies the overall structure by avoiding complex welded joints while maintaining temperature resistance through the modular design that allows each component to be optimized independently.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a cost-effective and efficient manufacturing process with improved mechanical stability and cooling efficiency, suitable for high-temperature epitaxial deposition processes.
Implementation Method 1
a first flange and a second flange connecting the inner and the outer casing and creating a liquid-tight interspace between them. Said first flange comprises at least one inlet for directing a cooling fluid in said liquid-tight interspace
Implementation Method 2
an induction heating system, for example comprising an induction coil wrapped around the reaction chamber and connected to a power generation circuit. In this case, the chamber may comprise one or more thermally conductive elements, such as an assembly of one or more graphite pieces. Indeed, graphite features high susceptivity and will heat up effectively under an alternating electromagnetic field.
Implementation Method 3
These temperatures may be achieved via an induction heating system, for example comprising an induction coil wrapped around the reaction chamber
Implementation Method 4
O-rings for sealing
Data Source
AI summary
The present invention relates to a casing assembly of a reactor for the epitaxial deposition of semiconductor films on a substrate. The casing assembly comprises an inner and an outer casing made of opaque and transparent quartz and connected by at least two flanges. The invention also relates to a reaction chamber enclosed by said casing assembly, and a reactor employing at least one of said reaction chambers.