Sandblasting Synthetic Quartz Substrate Using Spacer Plate Arrangement
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Solution Overview
Problem
In the production of large-sized synthetic quartz glass substrates, existing sandblasting methods often result in variations in processing amounts and abrasion at chamfered surfaces, leading to uneven chamfer widths, potential vacuum leakage, and prolonged processing times due to issues with air flow and abrasive grain distribution.
Innovation Solution
The method involves arranging spacers in contact with the substrate's outer peripheral side surfaces and plate materials in contact with the spacers, preventing gaps and air flow influence, thereby stabilizing the processing amount and preventing scratches and abrasion during sandblasting.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If plate materials are arranged close to substrate side surfaces to suppress air flow influence, then processing amount uniformity improves, but scratches may be generated on side surfaces
Solution Approach 1:
The patent introduces spacers as intermediary components between the plate materials and the substrate side surfaces. These spacers prevent direct contact between the plate materials and substrate, thereby preventing scratches while still maintaining the air flow suppression function. The spacers act as a mediating element that resolves the contradiction between needing close contact for air flow control and avoiding contact to prevent scratches.
2Manufacturing precision
If plate materials are positioned to prevent gaps with substrate side surfaces, then air flow influence is suppressed, but processing time increases due to scratch removal
Solution Approach 1:
By introducing spacers as intermediary components, the patent prevents direct contact between plate materials and substrate, thereby preventing scratches that would require additional removal processing. This resolves the time loss issue while maintaining the air flow suppression function needed for chamfer width uniformity.
3Manufacturing precision
If spacers are made tall to prevent gaps between plate materials and substrate, then air flow control improves, but complexity of the setup increases
Solution Approach 1:
The patent divides the air flow control function into two separate components: spacers that prevent gaps and maintain positioning, and plate materials that suppress air flow. This segmentation allows each component to be optimized independently - spacers can be simple cylindrical or rectangular elements while plate materials focus on air flow suppression, reducing overall system complexity compared to a single tall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively prevents local abrasion and variations in chamfer and side surface processing, reducing the risk of vacuum leakage and enabling faster achievement of high flatness and parallelism in synthetic quartz glass substrates.
Implementation Method 1
the generation of a gap between the side surfaces of the substrate and the plate materials can be prevented, and the influence of the air flow can be effectively suppressed
Implementation Method 2
sandblasting the surface of the substrate
Data Source
AI summary
The invention provides a method for producing a synthetic quartz glass substrate, the method includes arranging spacers to be in contact with outer peripheral side surfaces of a synthetic quartz glass substrate, arranging plate materials to be in contact with the outer peripheral side surfaces of the spacers in a state that the plates are protruded from the surface of the substrate, and sandblasting the surface of the substrate.