Quartz Vibration Element with Inclined Electrodes for Temperature Sensing
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Solution Overview
Problem
Quartz crystal vibrators face accuracy issues in temperature compensation due to heat transfer time differences between the quartz crystal substrate and temperature sensors, leading to low resolution of temperature change to frequency change, which affects the accuracy of temperature detection for oscillation signal output.
Innovation Solution
A vibration element with a quartz crystal substrate featuring a first vibration part and a second vibration part, where the second vibration part has excitation electrodes formed on an inclined surface, allowing for different frequency-temperature characteristics and improved temperature detection accuracy by using the second vibration part for temperature detection with increased frequency change to temperature change.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a temperature sensor is placed in a package separate from the quartz crystal substrate, then the temperature can be measured, but heat transfer time difference is generated between the quartz crystal substrate and the temperature sensor, reducing temperature compensation accuracy
Solution Approach 1:
The patent combines the temperature detection function directly into the quartz crystal substrate by forming a second vibration part on the same substrate as the first vibration part. This integration eliminates the heat transfer time difference between separate components, as both the oscillation signal generation and temperature detection occur at the same location on the quartz crystal substrate.
Solution Approach 2:
The patent uses the quartz crystal substrate itself as an intermediary medium that serves dual purposes: generating oscillation signals through the first vibration part and detecting temperature through the second vibration part. The substrate acts as the common thermal medium that transfers temperature to both vibration parts simultaneously, enabling accurate temperature measurement without external sensors.
2Device complexity
If excitation electrodes for oscillation signal output and temperature detection are formed at the same main surface with the same cutting angle, then device complexity is reduced, but the frequency-temperature characteristics become similar, resulting in low resolution of temperature change to frequency change
Solution Approach 1:
The patent applies different cutting angles to different regions of the quartz crystal substrate. The first vibration part uses a first cutting angle optimized for stable oscillation signal generation, while the second vibration part uses a second cutting angle that provides high sensitivity for temperature detection. This local differentiation of cutting angles allows each region to perform its specific function optimally without interfering with the other.
Solution Approach 2:
The patent divides the quartz crystal substrate into distinct functional segments: the first vibration part for oscillation signal output and the second vibration part for temperature detection. Each segment is independently configured with specific excitation electrodes and cutting angles tailored to its function, allowing the system to simultaneously achieve stable oscillation and high-resolution temperature measurement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables accurate temperature detection of the quartz crystal vibrator for oscillation signal output by utilizing the second vibration part's enhanced frequency-temperature characteristics, eliminating heat transfer time differences and improving the resolution of temperature change to frequency change.
Implementation Method 1
A quartz crystal vibrator having an excitation electrode formed at two main surfaces of a quartz crystal substrate has stable frequency-temperature characteristics
Implementation Method 2
the frequency-temperature characteristics of the second vibration part may include a greater amount of frequency change than the frequency-temperature characteristics of the first vibration part
Data Source
AI summary
A vibration element includes: a quartz crystal substrate having a first vibration part and a second vibration part; a pair of first excitation electrodes formed at two main surfaces of the quartz crystal substrate, at the first vibration part; and a pair of second excitation electrodes formed in such a way as to sandwich the second vibration part in a direction of thickness of the quartz crystal substrate, at the second vibration part. At least one second excitation electrode of the pair of second excitation electrodes is formed at an inclined surface inclined to at least one of the two main surfaces.