Quartz Crystal Vibrator Grooves with Variable-Thickness Etch Mask
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Solution Overview
Problem
Existing methods for manufacturing quartz crystal vibrators restrict the degree of freedom in design due to the collective formation of outer shapes and grooves using the micro loading effect in dry etching, limiting the ability to form grooves with different depths on multiple vibration arms.
Innovation Solution
A method involving the use of protective films with varying thicknesses to control the dry etching process, allowing for the formation of grooves with different depths on quartz crystal substrates without relying on the micro loading effect, thereby increasing design flexibility and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the micro loading effect of dry etching is used to collectively form the outer shape and grooves, then the manufacturing process is simplified, but the degree of freedom in design is reduced and grooves with different depths cannot be formed
Solution Approach 1:
The patent divides the etching process into multiple stages: first forming the outer shape, then selectively removing protective film in specific regions to form grooves with different depths. This segmentation allows independent control of outer shape and groove dimensions, resolving the contradiction between process simplicity and design freedom
Solution Approach 2:
The protective film is formed in advance with different thicknesses in different regions before the etching process. This preliminary action enables selective etching of grooves with different depths while maintaining the outer shape, achieving both manufacturing simplicity and design versatility
2Measurement precision
If grooves with different depths are formed on multiple vibration arms, then detection sensitivity is enhanced, but the manufacturing process becomes more complex
Solution Approach 1:
The protective film is applied with different thicknesses in different regions (first thickness in first groove regions, second thickness in second groove regions). This local quality variation enables selective etching to create grooves with different depths, enhancing detection sensitivity while using a relatively simple multi-step process
Solution Approach 2:
The patent changes the thickness parameter of the protective film in different regions to control the etching depth. By varying the protective film thickness rather than the etching conditions, the process achieves complex groove geometries with controlled complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the formation of vibrators with enhanced detection sensitivity by allowing for grooves of varying depths, improving the accuracy and flexibility of the manufacturing process while maintaining mechanical strength and reducing unnecessary vibrations.
Implementation Method 1
a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film
Data Source
AI summary
A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in an element formation region of the quartz crystal substrate at the first surface where the vibrator is formed; and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film. R1>R2, in which R1 is a thickness of the first protective film in a first groove formation region of the quartz crystal substrate where the first groove is formed and R2 is a thickness of the first protective film in the second groove formation region where the second groove is formed.