Quartz Vibrator Wafer Singulation Using Film Stretching
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Solution Overview
Problem
Existing methods for manufacturing piezoelectric vibrators are inefficient due to long manufacturing times and difficulties in preventing waste scattering, and there is a risk of damaging electrodes during the singulation process, which affects vibration characteristics.
Innovation Solution
A method involving a quartz-crystal wafer with a support and vibration part arranged side by side, where the support and holding portions are adhered to a film via an adhesive, and the film is stretched to singulate the vibrators, preventing damage and scattering of debris.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If piezoelectric vibrator elements are broken off one by one, then the coupling portion can be broken cleanly, but the manufacturing time becomes long
Solution Approach 1:
Multiple vibrators are broken off simultaneously in a single operation rather than one by one. The breaking device applies force to multiple coupling portions at the same time, achieving clean breaking while significantly reducing manufacturing time through parallel processing
Solution Approach 2:
A breaking device with multiple breaking pins acts as an intermediary tool to simultaneously apply controlled force to multiple coupling portions. This mediator enables synchronized breaking while maintaining precision through the designed pin configuration and force distribution
2Productivity
If breaking pins are pressed against piezoelectric elements to singulate them, then multiple elements can be singulated simultaneously, but electrodes may be damaged causing deterioration in vibration characteristics
Solution Approach 1:
The breaking operation is extracted and performed on the coupling portion between the vibrator and wafer rather than directly on the vibrator body. This separates the breaking action from the electrode-containing vibrator structure, enabling simultaneous singulation without electrode damage and preserving vibration characteristics
Solution Approach 2:
The wafer structure is segmented into individual vibrators through breaking of coupling portions. Multiple vibrators are singulated simultaneously by breaking their respective coupling portions, achieving high productivity while the breaking location is chosen to avoid electrode damage
3Ease of manufacture
If coupling portions are broken to separate vibrators, then singulation is achieved, but breaking-off waste scatters and is difficult to prevent
Solution Approach 1:
The breaking-off waste generated during singulation is converted into a contained byproduct. The wafer structure is designed so that broken coupling portions remain attached to or are contained by the wafer framework, transforming the harmful scattering waste into controlled debris that can be easily collected and removed
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method reduces manufacturing time, prevents damage to the vibrators, and maintains vibration characteristics by securely adhering the support and holding portions to the film, allowing for simultaneous singulation of multiple vibrators without scattering debris.
Implementation Method 1
an adhering process of fixing at least the support portion and the holding portion of the quartz-crystal wafer to a film via an adhesive
Data Source
AI summary
A method for manufacturing a vibrator includes: a preparation process of preparing a quartz-crystal wafer including a vibrator and a holding portion, the vibrator including a support portion and a vibration part arranged side by side along a first direction, the holding portion being coupled to one end portion of the support portion in a second direction intersecting the first direction; an adhering process of fixing at least the support portion and the holding portion of the quartz-crystal wafer to a film via an adhesive; and a singulation process of stretching the film along the second direction, and separating and singulating the vibrator from the holding portion.