Quartz Vibrator Support Structure for Unwanted Vibration Isolation
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Solution Overview
Problem
Existing vibrator devices face limitations in preventing unnecessary vibrations due to restricted beam shapes, which restrict frequency design and vibration isolation efficiency.
Innovation Solution
The vibrator device incorporates a support substrate with a specific configuration of beams and supports that satisfy relationships between resonance and drive frequencies, and spring constants, along with a quartz crystal substrate for both the vibrator and support substrates, to effectively attenuate unnecessary vibrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If beam portions are formed to fill in a gap of the vibrator body, then the vibrator body is supported, but the shape of the beam portions is limited and frequency design of unnecessary vibration is restricted
Solution Approach 1:
The support substrate is divided into multiple functional regions: a base portion supporting the vibrator body, support portions extending from the base, and beam portions coupling the base and supports. This segmentation allows independent optimization of each region's shape and properties, enabling flexible frequency design without being constrained by the vibrator body gap geometry.
Solution Approach 2:
The beam portions are designed to extend in multiple directions and dimensions beyond simply filling the vibrator body gap. By adding dimensional complexity to the beam structure (extending in A and B axes directions, creating multi-level support), the design freedom is increased, allowing optimization of vibration frequency characteristics independent of the vibrator body shape.
2Object-affected harmful factors
If beam portions are designed to support the vibrator body, then mechanical strength is maintained, but displacement amplitude magnification of unnecessary vibration is not sufficiently reduced
Solution Approach 1:
Different portions of the support substrate are assigned different mechanical properties and functions: the base portion provides rigid support for mechanical strength, while the beam portions are designed with specific spring constants (Ka and Kb) to selectively attenuate unnecessary vibrations. The support portions positioned at specific locations provide targeted vibration isolation. This local differentiation allows simultaneous optimization of strength and vibration attenuation without compromise.
3Object-affected harmful factors
If spring constant Ka is greater than Kb, then vibration along B axis is attenuated, but the beam structure becomes more complex
Solution Approach 1:
The beam portions are designed with asymmetric properties: the spring constant Ka along the A axis is made greater than the spring constant Kb along the B axis. This asymmetry is achieved through differential design of the beam geometry (different lengths, thicknesses, or cross-sectional dimensions in different directions). The asymmetric structure selectively attenuates vibration along the B axis while maintaining appropriate stiffness along the A axis, optimizing vibration isolation performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces displacement amplitude magnification of unnecessary vibrations to less than 0.8, enhancing vibration isolation and maintaining mechanical strength, thereby improving the overall vibration characteristic of the device.
Implementation Method 1
Ka is a spring constant of an elastic deformation of the beam along the A axis and Kb is a spring constant of an elastic deformation of the beam along the B axis
Implementation Method 2
vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis
Data Source
AI summary
Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0<f1 is satisfied in which f0 is a resonance frequency of a vibration of the vibrator structure body along the B axis and f1 is a drive frequency of the vibrator element.


