Ultrasonic Quartz Window Cleaning With Particle Carry-Away Flow
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Solution Overview
Problem
Conventional ultrasonic cleaning methods for quartz windows in plasma processing chambers fail to provide consistently particle-free results due to recirculation and redeposition of particles in the cleaning bath.
Innovation Solution
An ultrasonic cleaning apparatus with a circular tank, multiple cleaning fluid inlets, and an intermediate support that generates ultrasonic waves, directing the cleaning fluid to remove particles from the article and prevent recirculation, ensuring an ultra-clean surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional ultrasonic cleaning baths are used, then cleaning capability is provided, but particles recirculate and redeposit on the window
Solution Approach 1:
The patent extracts and removes particles from the cleaning fluid using a filtration system, separating the harmful particles from the cleaning environment to prevent their recirculation and redeposition on the quartz window
Solution Approach 2:
The patent introduces a controlled fluid flow system as an intermediary mechanism that directs clean fluid across the window surface and carries particles away through designated pathways, preventing particle redeposition
2Duration of action of stationary object
If cleaning fluid is circulated in the bath, then continuous cleaning is maintained, but particles recirculate and cause redeposition
Solution Approach 1:
The patent continuously extracts particles from the circulating fluid through filtration systems, maintaining continuous cleaning capability while removing particles that would otherwise recirculate and cause redeposition
Solution Approach 2:
The patent uses a controlled fluid flow system as an intermediary that directs clean fluid across the window surface and transports particles to collection points, enabling continuous cleaning without particle recirculation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively removes particles from quartz articles, such as windows, with low incidence of recirculation, thereby maintaining their cleanliness and preventing redeposition, making it suitable for ultra-clean applications.
Implementation Method 1
an ultrasonic generator coupled to the tank for generating ultrasonic waves in the tank and cleaning fluid received therein
Implementation Method 2
exciting the cleaning fluid with ultrasonic waves
Data Source
AI summary
Ultrasonic cleaning apparatuses and methods of cleaning substantially planar articles. An apparatus comprises (i) a substantially circular tank; (ii) a plurality of cleaning fluid inlets for delivering a cleaning fluid to the tank; (iii) an intermediate support for receiving an article to be cleaned; and (iv) an ultrasonic generator coupled to the tank for generating ultrasonic waves in the tank and cleaning fluid received therein. The apparatus is configured to remove particles from a substantially planar article and have them carried by flow of cleaning fluid away from the article and out of the tank. Using such an apparatus, a cleaning method comprises introducing a substantially planar article to be cleaned into the tank; introducing a cleaning fluid into the tank through the plurality of cleaning fluid inlets; and exciting the cleaning fluid with ultrasonic waves.