Quartz Glass Window Coating for Deep UV Light Transmission

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current window materials for ultraviolet LEDs, particularly in the deep ultraviolet region, face challenges in shaping synthetic quartz glass into lens forms due to its difficulty in processing, and existing antireflection methods fail to reliably control light distribution and total light transmittance, especially when exposed to long-term ultraviolet light.

Innovation Solution

A window material comprising a synthetic quartz glass substrate with a flat plate shape and a three-layer antireflection film structure, including Al2O3, HfO2, and MgF2 or SiO2 thin films, which is easy to process and maintains high total light transmittance and stability over time, effectively controlling light distribution properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If synthetic quartz glass is used as window material for deep ultraviolet LED, then good transmittance of short-wavelength light is achieved, but difficulty in cutting and shaping into lens form increases

Engineering Contradiction:
Improvetransmittance of short-wavelength lightVSAvoidease of cutting and shaping
Core Design Contradiction:
Illumination intensityVSEase of manufacture

Solution Approach 1:

The invention changes the surface state parameter of the quartz glass from smooth to rough, creating a rough surface that enables effective antireflection without requiring complex lens shaping. This parameter change allows the material to maintain its excellent UV transmittance while becoming easier to manufacture in flat plate form.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention creates a composite structure by combining rough surface treatment with a multi-layer antireflection film (silicon oxide layer and fluorocarbon hydrocarbon compound layer) on the quartz glass substrate. This composite approach achieves superior antireflection performance and light distribution control without the manufacturing difficulties of lens shaping.

Inventive Principle:
Principle #40Composite materials

2Shape

If lens-shaped window material is used to control light distribution properties, then light distribution control is improved, but manufacturing complexity and cost increase

Engineering Contradiction:
Improvelight distribution controlVSAvoidmanufacturing complexity
Core Design Contradiction:
ShapeVSDevice complexity

Solution Approach 1:

Instead of shaping the quartz glass into a lens to control light distribution, the invention inverts the approach by using a flat plate with a rough surface and antireflection film coating to achieve the same light distribution control effect. This simplifies manufacturing while maintaining optical performance.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The invention changes the surface state parameter from smooth to rough, which fundamentally alters the light interaction characteristics. This parameter change enables effective light distribution control and antireflection performance without requiring complex lens shaping, thereby reducing manufacturing complexity.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If smooth surface quartz glass is used, then manufacturing is easier, but light reflection increases reducing total light transmittance

Engineering Contradiction:
Improveease of processingVSAvoidlight reflection loss
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

The invention changes the surface state parameter from smooth to rough, which fundamentally alters light interaction. This parameter change reduces reflection losses and improves total light transmittance while maintaining ease of manufacturing in flat plate form, eliminating the need for energy-intensive lens shaping processes.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention creates a composite structure with a rough surface and multi-layer antireflection film coating on the quartz glass substrate. This composite approach minimizes light reflection through both surface roughness and refractive index matching, achieving high total light transmittance without the manufacturing complexity of lens shaping.

Inventive Principle:
Principle #40Composite materials

4Loss of energy

If existing antireflection methods are used, then some reflection reduction is achieved, but reliability in controlling total light transmittance and light distribution deteriorates

Engineering Contradiction:
Improvereflection reductionVSAvoidreliability of light distribution control
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The invention creates a composite antireflection system combining rough surface treatment with a multi-layer film structure (silicon oxide layer and fluorocarbon hydrocarbon compound layer). This composite approach provides reliable and stable control of total light transmittance and light distribution properties, overcoming the limitations of existing single-method antireflection techniques.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The invention applies different properties to different parts of the window material: a rough surface structure for overall light scattering and antireflection, combined with a multi-layer film coating for targeted wavelength optimization. This local quality differentiation ensures reliable performance across the deep ultraviolet spectrum.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides a window material that is easy to shape, stable over a wide wavelength range, and offers high total light transmittance and reliable light distribution control, enhancing the performance of ultraviolet LEDs in deep ultraviolet applications.

Implementation Method 1

at least one of the main surfaces being a rough surface

Methodology Applied
Scientific EffectLight scattering: Scattering

Implementation Method 2

an antireflection film formed on the at least one main surface of the synthetic quartz glass substrate

Methodology Applied
Scientific EffectAntireflection coating: Anti-Reflective Coating

Implementation Method 3

including three layers of a first layer, a second layer, and a third layer in this order from a side of the synthetic quartz glass substrate, the layers being formed of a thin film containing Al2O3, a thin film containing HfO2, and a thin film containing MgF2 or SiO2

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS20240250223A1Window material for optical element, lid for optical element package, and optical element package
Publication Date: 2024.07.25 SHIN ETSU CHEMICAL CO LTD
  • US20240250223A1 patent drawing
  • US20240250223A1 patent drawing
  • US20240250223A1 patent drawing

AI summary

A window material for an optical element, including: a synthetic quartz glass substrate having a flat plate shape and having main surfaces through which light is transmitted, at least one of the main surfaces being a rough surface; and an antireflection film formed on the at least one main surface of the synthetic quartz glass substrate, the main surface being the rough surface. The window material for an optical element of the present invention is easy in shape processing, undergoes little temporal change in a wide wavelength region and is stable over a long period of time, and has high total light transmittance of distributed light.