Quartz Glass Window Coating for Deep UV Light Transmission
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Solution Overview
Problem
Current window materials for ultraviolet LEDs, particularly in the deep ultraviolet region, face challenges in shaping synthetic quartz glass into lens forms due to its difficulty in processing, and existing antireflection methods fail to reliably control light distribution and total light transmittance, especially when exposed to long-term ultraviolet light.
Innovation Solution
A window material comprising a synthetic quartz glass substrate with a flat plate shape and a three-layer antireflection film structure, including Al2O3, HfO2, and MgF2 or SiO2 thin films, which is easy to process and maintains high total light transmittance and stability over time, effectively controlling light distribution properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If synthetic quartz glass is used as window material for deep ultraviolet LED, then good transmittance of short-wavelength light is achieved, but difficulty in cutting and shaping into lens form increases
Solution Approach 1:
The invention changes the surface state parameter of the quartz glass from smooth to rough, creating a rough surface that enables effective antireflection without requiring complex lens shaping. This parameter change allows the material to maintain its excellent UV transmittance while becoming easier to manufacture in flat plate form.
Solution Approach 2:
The invention creates a composite structure by combining rough surface treatment with a multi-layer antireflection film (silicon oxide layer and fluorocarbon hydrocarbon compound layer) on the quartz glass substrate. This composite approach achieves superior antireflection performance and light distribution control without the manufacturing difficulties of lens shaping.
2Shape
If lens-shaped window material is used to control light distribution properties, then light distribution control is improved, but manufacturing complexity and cost increase
Solution Approach 1:
Instead of shaping the quartz glass into a lens to control light distribution, the invention inverts the approach by using a flat plate with a rough surface and antireflection film coating to achieve the same light distribution control effect. This simplifies manufacturing while maintaining optical performance.
Solution Approach 2:
The invention changes the surface state parameter from smooth to rough, which fundamentally alters the light interaction characteristics. This parameter change enables effective light distribution control and antireflection performance without requiring complex lens shaping, thereby reducing manufacturing complexity.
3Ease of manufacture
If smooth surface quartz glass is used, then manufacturing is easier, but light reflection increases reducing total light transmittance
Solution Approach 1:
The invention changes the surface state parameter from smooth to rough, which fundamentally alters light interaction. This parameter change reduces reflection losses and improves total light transmittance while maintaining ease of manufacturing in flat plate form, eliminating the need for energy-intensive lens shaping processes.
Solution Approach 2:
The invention creates a composite structure with a rough surface and multi-layer antireflection film coating on the quartz glass substrate. This composite approach minimizes light reflection through both surface roughness and refractive index matching, achieving high total light transmittance without the manufacturing complexity of lens shaping.
4Loss of energy
If existing antireflection methods are used, then some reflection reduction is achieved, but reliability in controlling total light transmittance and light distribution deteriorates
Solution Approach 1:
The invention creates a composite antireflection system combining rough surface treatment with a multi-layer film structure (silicon oxide layer and fluorocarbon hydrocarbon compound layer). This composite approach provides reliable and stable control of total light transmittance and light distribution properties, overcoming the limitations of existing single-method antireflection techniques.
Solution Approach 2:
The invention applies different properties to different parts of the window material: a rough surface structure for overall light scattering and antireflection, combined with a multi-layer film coating for targeted wavelength optimization. This local quality differentiation ensures reliable performance across the deep ultraviolet spectrum.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a window material that is easy to shape, stable over a wide wavelength range, and offers high total light transmittance and reliable light distribution control, enhancing the performance of ultraviolet LEDs in deep ultraviolet applications.
Implementation Method 1
at least one of the main surfaces being a rough surface
Implementation Method 2
an antireflection film formed on the at least one main surface of the synthetic quartz glass substrate
Implementation Method 3
including three layers of a first layer, a second layer, and a third layer in this order from a side of the synthetic quartz glass substrate, the layers being formed of a thin film containing Al2O3, a thin film containing HfO2, and a thin film containing MgF2 or SiO2
Data Source
AI summary
A window material for an optical element, including: a synthetic quartz glass substrate having a flat plate shape and having main surfaces through which light is transmitted, at least one of the main surfaces being a rough surface; and an antireflection film formed on the at least one main surface of the synthetic quartz glass substrate, the main surface being the rough surface. The window material for an optical element of the present invention is easy in shape processing, undergoes little temporal change in a wide wavelength region and is stable over a long period of time, and has high total light transmittance of distributed light.


