Quick Disconnect RTD Assembly for Rotating Pedestal
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Solution Overview
Problem
The complexity of rotating pedestal designs in deposition chambers makes it difficult to install or remove resistance temperature detector (RTD) assemblies without damaging parts and requires significant time, due to the need to disconnect vacuum and electrical feeds.
Innovation Solution
A quick disconnect RTD heater assembly is introduced, divided into two sections: a first assembly that includes a pedestal and RTD, and a second assembly with a rotating module, allowing for easy installation and removal from the top of the chamber, with spring-loaded pins and sockets for secure connection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a typical RTD assembly is inserted inside the pedestal after installation from the bottom, then the RTD sensor can monitor temperature, but the rotating mechanism below the chamber makes it difficult to install or remove the RTD assembly without damaging parts and requires considerable time
Solution Approach 1:
The patent inverts the traditional installation approach by changing from bottom-up insertion to top-down installation. The RTD assembly is now installed from the top of the chamber onto the rotating pedestal, rather than being inserted from the bottom after pedestal installation. This inversion eliminates the difficulty caused by the rotating mechanism below the chamber, allowing easy installation and removal without part damage.
2Reliability
If a typical RTD assembly is inserted inside the pedestal after installation from the bottom, then the RTD sensor can monitor temperature, but a considerable amount of time is required to install or remove the RTD assembly
Solution Approach 1:
The patent inverts the traditional installation approach by changing from bottom-up insertion to top-down installation. The RTD assembly is now installed from the top of the chamber onto the rotating pedestal, rather than being inserted from the bottom after pedestal installation. This inversion eliminates the difficulty caused by the rotating mechanism below the chamber, allowing easy installation and removal without part damage.
3Ease of manufacture
If the pedestal or heater has local non-uniform temperature distribution from heater element layout, lift pin holes, non-uniform radiative heat loss, or non-uniform contact surface, then the heater can be installed, but the local non-uniform temperature distribution significantly impacts deposition uniformity
Solution Approach 1:
The patent segments the heater into multiple independently controllable heating zones. Instead of a single heater element, the heater is divided into several zones that can be controlled separately. This allows compensation for local non-uniformities by adjusting the power distribution to each zone, thereby achieving uniform temperature distribution across the substrate surface and improving deposition uniformity.
Solution Approach 2:
The patent implements local quality control by providing different heating characteristics to different regions of the heater. Each heating zone can be independently adjusted to compensate for local variations in thermal conductivity, radiative heat loss, or contact surface uniformity. This localized control ensures that each region contributes appropriately to achieving overall uniform temperature distribution for high-precision deposition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design simplifies the installation and removal process, reducing the risk of part damage and time required, while maintaining secure connections for power and signal transmission.
Implementation Method 1
one or more spring loaded RTD pins that contact the at least one RTD disposed in the first assembly when the first and second assemblies are coupled together
Data Source
AI summary
Embodiments of the present disclosure are directed to a quick disconnect resistance temperature detector (RTD) heater assembly, that includes a first assembly comprising a pedestal, a pedestal shaft, an adapter, one or more heater power supply terminals, and at least one RTD, and a second assembly comprising a rotating module having a central opening, and a cable assembly partially disposed in the central opening and securely fastened to the rotating module, wherein the first assembly is removably coupled to the second assembly, wherein the cable assembly includes one or more power supply sockets that receive the heater power supply terminals when the first and second assemblies are coupled together, and wherein the cable assembly includes one or more spring loaded RTD pins that contact the at least one RTD disposed in the first assembly when the first and second assemblies are coupled together.