Quick Release Purge Valve for Substrate Containers
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Solution Overview
Problem
The existing methods for replacing filtration sheets and other components in reticle pods during photolithography processes are inefficient due to the need to remove and reinstall screws and the bottom plate, making the process time-consuming and cumbersome.
Innovation Solution
A quick release purge valve system utilizing a detachable snap plate that engages with the bottom plate of a substrate container, allowing for easy removal and replacement of components without the need for screws, while maintaining a flat surface for transportation and cleanliness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If screws are used to fix the purge valve and filtration sheet to the bottom plate, then the components are securely fixed, but the replacement process becomes time-consuming and complex
Solution Approach 1:
The bottom plate is segmented into a main body and a detachable snap plate that can be quickly removed. The purge valve and filtration sheet are grouped as a removable assembly that attaches to the bottom plate through the snap plate, allowing rapid replacement without removing individual screws from the main structure.
Solution Approach 2:
The snap plate provides a dynamic fixation mechanism that transitions between locked and unlocked states. When locked, it secures the purge valve assembly firmly; when unlocked, it allows quick removal. This dynamic system replaces static screw fixation with a movable latch mechanism.
2Ease of operation
If the bottom plate is entirely removed to replace the filtration sheet, then complete access is achieved, but the operation becomes cumbersome and complex
Solution Approach 1:
The bottom plate is divided into a permanent main body and a removable snap plate portion. The snap plate is specifically segmented to provide access to the filtration sheet while leaving the rest of the bottom plate intact, reducing the complexity of the replacement procedure.
Solution Approach 2:
The snap plate is extracted as a separate, removable component from the bottom plate assembly. This extracted portion provides the necessary access to the filtration sheet without requiring removal of the entire bottom plate, simplifying the maintenance operation.
3Productivity
If the snap plate is used for quick release, then component replacement efficiency is improved, but the snap plate must remain at most evenly aligned with the bottom plate to maintain flatness
Solution Approach 1:
The snap plate is designed with localized engagement features that concentrate the alignment requirements to specific points rather than the entire surface. The snap-fit mechanism engages at discrete locations, allowing the snap plate to be quickly installed while maintaining flatness at the critical contact points with the bottom plate.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution significantly reduces the time and effort required for component replacement, enhances work efficiency, and ensures the cleanliness and flatness necessary for transporting substrate containers, thereby improving the overall manufacturing process.
Implementation Method 1
The snap plate includes a main body and an elastic arm. The main body is used for fixing to one side of the gasket fitting, and one end of the elastic arm is connected to the main body and the other end of the elastic arm is used for engaging with the bottom plate.
Data Source
AI summary
A quick release purge valve and a substrate container using same are provided. The container includes a base which has a cover plate and a bottom plate. The quick release purge valve includes a snap plate, a gasket fitting, and a valve element. The snap plate detachably engages with the bottom plate and is at most evenly aligned with the bottom plate. The gasket fitting is disposed between the cover plate and the bottom plate and has an airflow conduit communicating the two plates. The valve element is disposed in the conduit for limiting a flow direction of the gas. The gasket fitting is fixed in the base when the snap plate and the bottom plate are in an engaged state and is removable from the base when the snap plate and the bottom plate are in a disengaged state.