Quick-Release Valve Module With Flexible Grommet Sealing
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Solution Overview
Problem
Existing quick-release valve modules in SMIF systems for semiconductor manufacturing suffer from contamination due to metal particle friction and require frequent replacements, leading to increased production costs and challenges in assembling and mounting on reticle pods.
Innovation Solution
A quick-release valve module featuring a flexible grommet, piston with a disc portion, filter module, and elastic member, which forms a sealing mechanism to prevent particle entry and allows for easy assembly and replacement, utilizing an annular securing member for secure locking in the air passage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If metal springs are used to actuate the valve opening and closing, then the valve can be operated, but metal particles are generated due to friction between springs and valve walls, causing contamination
Solution Approach 1:
The patent replaces the traditional metal spring mechanism with a magnetic field-based actuation system. Magnets are used to attract and move the valve plug without physical contact, eliminating friction between metal components and preventing metal particle generation. The magnetic force provides the necessary actuation force to open and close the valve while maintaining a particle-free environment.
Solution Approach 2:
The patent introduces a magnetic field as an intermediary between the actuator and the valve plug. Instead of direct mechanical contact between metal springs and the valve plug, the magnetic field serves as the mediating force that transmits the actuation action without physical contact, thereby preventing friction-induced particle contamination.
2Reliability
If commercial valves are used, then the valve function is provided, but frequent replacements are needed due to elastic fatigue, increasing production cost
Solution Approach 1:
The valve is designed as a segmented modular system where the valve body, valve plug, and magnetic actuation components are separate replaceable units. This segmentation allows individual components to be replaced independently based on their specific wear patterns or failure modes, rather than replacing the entire valve assembly. The modular design reduces replacement costs and simplifies maintenance procedures.
Solution Approach 2:
The patent changes the fundamental operating parameter from elastic mechanical force (springs) to magnetic force. This parameter change eliminates the elastic fatigue issue that plagues traditional spring-based valves, as magnetic fields do not degrade through repeated use. The magnetic actuation system maintains consistent performance over time without the degradation seen in elastic materials.
3Reliability
If the valve is disposed in a valve seat on the base with a cover to secure it, then the valve is secured, but replacing the valve requires removing the back cover, creating obstacles and causing particles to adhere at the bottom
Solution Approach 1:
The patent extracts the valve plug and magnetic actuation components as a separate removable assembly from the valve body. This extraction design allows the valve components to be removed and replaced without disassembling the valve body or removing the back cover of the container. The extracted components can be easily accessed through the opening, simplifying replacement procedures and avoiding particle adhesion issues caused by cover removal.
4Reliability
If traditional valves are used, then the sealing function is provided, but assembly is complex and mounting on reticle pod is difficult
Solution Approach 1:
The patent merges the sealing function with the magnetic actuation mechanism and the valve body structure. The magnetic components are integrated into the valve assembly in a way that the sealing elements are positioned and secured by the same structural features that provide magnetic actuation. This merging reduces the number of separate sealing components and simplifies the assembly process, making both manufacturing and mounting on reticle pods easier while maintaining reliable sealing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces particle contamination, facilitates easier assembly and replacement, and enhances the industrial applicability by providing a more reliable and cost-effective valve module for wafer and reticle processing, particularly in EUV lithography processes.
Implementation Method 1
an elastic member disposed between the another end of the piston and the filter module
Data Source
AI summary
The present invention provides a quick-release valve module which includes a flexible grommet defining a channel, and a piston having a disc portion at an end thereof, wherein the disc portion of the piston is exposed to the flexible grommet.