Quiescent Current Test Apparatus for Semiconductor Defect Detection
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Solution Overview
Problem
Miniaturization of semiconductor devices leads to internal leak currents, making it difficult to distinguish between normal and abnormal currents in defectiveness judgments, reducing the accuracy of quiescent power supply current-based defect detection methods.
Innovation Solution
A test apparatus and method that measures quiescent current at multiple voltage levels, using a power supply section, current measuring section, and analyzing section to separate normal and abnormal currents by analyzing resistance values based on exponential and proportional current terms, allowing for accurate defect detection even with leak currents.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If miniaturization of semiconductor elements is implemented, then device size is reduced, but internal leak current increases making defect detection difficult
Solution Approach 1:
The quiescent current is segmented into multiple voltage-level measurements. By dividing the current-voltage characteristic measurement into discrete voltage steps and analyzing the relationship between voltage and current, the method can distinguish between normal leak current (proportional to voltage) and abnormal defect current (exponential relationship), thereby maintaining defect detection accuracy in miniaturized devices.
Solution Approach 2:
The method changes the voltage parameter to multiple discrete levels and measures the corresponding current values. By analyzing how current varies with voltage (proportional vs exponential relationships), the method can identify defect characteristics even in miniaturized devices where leak currents are present, thus resolving the contradiction between miniaturization and measurement precision.
2Ease of operation
If quiescent current measurement is used for defect detection, then test simplicity is improved, but measurement precision deteriorates due to inability to distinguish normal and abnormal currents
Solution Approach 1:
The method transitions from a static single-point current measurement to a dynamic multi-voltage-level measurement approach. By varying the voltage and observing how current responds (proportional vs exponential changes), the system maintains simplicity while achieving precise distinction between normal and abnormal currents through the dynamic relationship analysis.
Solution Approach 2:
The method uses feedback from multiple voltage-current measurement points to determine defect characteristics. By measuring current at various voltage levels and analyzing the relationship pattern, the system can distinguish between normal leak current and defect-induced current, improving measurement precision while maintaining the simplicity of quiescent current-based testing.
3Productivity
If single voltage level measurement is used, then testing speed is improved, but measurement precision is reduced due to insufficient current characterization
Solution Approach 1:
The method applies partial action by measuring at a selected number of discrete voltage levels rather than continuous measurement. This approach provides sufficient current characterization to distinguish defect types without requiring exhaustive measurement, thus maintaining testing speed while improving measurement precision through multi-point voltage-current relationship analysis.
Data Source
AI summary
Provided is A test apparatus that tests a device under test, including a power supply section that supplies power to a power supply terminal of the device under test; a power supply control section that controls the power supply section to output the power at a plurality of voltage levels; a current measuring section that measures, at each voltage level, a current value of a quiescent current of the device under test, the quiescent current being supplied to the power supply terminal of the device under test by the power supply section; and an analyzing section that analyzes whether a defect is present in the device under test by using at least three current values from among the current values measured by the current measuring section at the plurality of voltage levels.