Radial-Flow Plasma Source for Nonplanar Surface Treatment
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Solution Overview
Problem
Existing atmospheric-pressure plasma sources face challenges with gas entrainment and inefficient mass transport of plasma-excited reactive gases to substrate surfaces, limiting their effectiveness in surface treatment, especially for nonplanar surfaces and large or complex shapes.
Innovation Solution
The integration of a radial-flow surface with a jet nozzle into the plasma source design, allowing for confined jet impingement and outward radial flow, which reduces gas entrainment and enhances mass transport by confining the plasma-excited reactive gas between the radial-flow surface and the treatment surface, ensuring efficient delivery of reactive species to the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional plasma source design is used, then plasma generation is achieved, but gas entrainment occurs and mass transport of reactive gases to substrate surfaces is inefficient
Solution Approach 1:
The plasma source is segmented into distinct functional zones: a plasma generation region with electrodes, a transition region, and a radial flow region. This segmentation allows the plasma to be generated in a controlled environment and then directed through a radial flow path that confines the reactive species, preventing gas entrainment while maintaining treatment effectiveness.
Solution Approach 2:
A radial flow surface acts as an intermediary structure between the plasma generation region and the substrate. This intermediate component guides the plasma-excited reactive gases along a confined radial path, ensuring efficient mass transport to the substrate surface while preventing ambient gas entrainment into the plasma flow.
2Productivity
If a conventional plasma source design is used, then plasma generation is achieved, but mass transport of reactive gases to substrate surfaces is inefficient
Solution Approach 1:
The radial flow surface is pre-configured to create optimized flow paths before the plasma is generated. This preliminary structural arrangement ensures that once plasma is generated, the reactive species immediately follow efficient radial trajectories to the substrate, minimizing transport time and maximizing mass transport efficiency.
Solution Approach 2:
The design transitions from conventional linear or unconfined plasma flow to a structured radial flow pattern in multiple dimensions. The radial flow surface creates a two-dimensional confined flow field that directs reactive species efficiently across the substrate surface, significantly improving mass transport compared to conventional one-dimensional approaches.
3Productivity
If a radial-flow surface with jet nozzle is integrated into the plasma source, then gas entrainment is reduced and mass transport is enhanced, but device complexity increases
Solution Approach 1:
The radial flow surface and jet nozzle are merged with the plasma source structure to form an integrated device. This combination eliminates the need for separate components and complex assembly, reducing overall device complexity while maintaining the enhanced surface treatment performance through confined radial flow.
Solution Approach 2:
The radial flow surface serves multiple functions simultaneously: it confines the plasma flow, directs reactive species to the substrate, prevents gas entrainment, and structures the radial flow pattern. This multi-functionality reduces the need for additional components, thereby maintaining simplicity despite the enhanced performance capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves the surface treatment performance by minimizing gas entrainment and enhancing the transport of reactive species, enabling effective treatment of both flat and complex substrate surfaces at atmospheric pressure and low temperatures.
Implementation Method 1
an AC power supply that supplies power to the at least one electrode to form a plasma in the gas
Implementation Method 2
a radial-flow surface having a jet nozzle through which the gas flows, wherein the radial-flow surface has a surface profile that conforms to a nonplanar treatment surface of an object
Data Source
AI summary
An atmospheric-pressure plasma treatment system includes a plasma source including at least one electrode, a gas in a gas chamber, and an AC power supply that supplies power to the at least one electrode to form a plasma in the gas. A radial-flow surface has a jet nozzle through which the gas flows and the radial-flow surface has a surface profile that conforms to a nonplanar treatment surface of an object. The radial-flow surface is separated from the nonplanar treatment surface by a gap that is less than 2 times a diameter of the jet nozzle so that the gas flows radially outward from the nozzle and between the radial-flow surface and the nonplanar treatment surface.


