Radial Ball-Screw Vacuum Valve Actuator for Tight Pump Clearance
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Solution Overview
Problem
The existing vacuum valves and actuators often face restrictions in disposition due to their length, particularly when installed near vacuum pumps, leading to interference with the pump and accessory equipment.
Innovation Solution
The vacuum valve incorporates a poppet type actuator with a shaft, a drive unit including a ball screw shaft and a drive source, and a connection part that allows the actuator to be disposed side by side with the shaft in a radial direction, reducing the axial length and preventing interference with the vacuum pump.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the actuator is disposed in the axial direction of the shaft, then the driving function is achieved, but the length becomes long causing interference with vacuum pump and accessory equipment
Solution Approach 1:
The patent transitions the actuator arrangement from the axial direction to the radial direction of the shaft. The drive unit is disposed to extend radially outward from the shaft, changing the spatial dimension of the actuator layout. This dimensional change reduces the axial length while maintaining the driving function through the connection part that translates radial drive motion to axial shaft movement.
2Adaptability or versatility
If the actuator length is reduced to avoid interference, then installation flexibility is improved, but the driving capability may be compromised
Solution Approach 1:
By arranging the drive unit radially rather than axially, the patent achieves compact axial length for improved installation flexibility while maintaining full driving capability through the mechanical connection system.
Solution Approach 2:
The connection part is disposed within or around the shaft structure, nesting the drive mechanism components in a space-efficient arrangement that maintains driving power while reducing overall actuator footprint.
3Device complexity
If the ball screw shaft and shaft are connected directly, then the structure is simple, but the connection part cannot move axially to cover the exhaust port
Solution Approach 1:
The connection part serves as an intermediary component between the ball screw shaft and the shaft. It translates the rotational and radial motion from the ball screw mechanism into axial movement of the shaft, enabling the valve plate to cover the exhaust port while maintaining a relatively simple overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for a more flexible disposition of the vacuum valve and actuator, reducing the risk of interference with the vacuum pump and accessory equipment, thereby enhancing installation flexibility.
Implementation Method 1
a ball screw shaft and a drive source that rotates the ball screw shaft
Data Source
AI summary
A vacuum valve includes a valve plate that covers an exhaust port of a vacuum chamber, and a poppet type actuator that drives the valve plate in an axial direction orthogonal to a surface of the vacuum chamber on which the exhaust port is provided. The actuator includes a shaft that is connected to the valve plate, a drive unit that is disposed side by side with the shaft in a radial direction of the shaft and includes a ball screw shaft and a drive source that rotates the ball screw shaft, and a connection part that connects the ball screw shaft and the shaft and moves in the axial direction together with the shaft to a position where the valve plate covers the exhaust port.