Radiant-Coated Tube Heater for Uniform Corrosive Fluid Heating
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Solution Overview
Problem
Existing fluid heating apparatuses using thermal radiation for semiconductor processes face inefficiencies in heating uniformity and cost due to high thermal-radiation absorption variability and material incompatibility with corrosive fluids, particularly with fluids like diluted hydrofluoric acid.
Innovation Solution
A fluid heating apparatus featuring a tubular structure coated with radiant-light-absorbing paint surrounding a heating lamp, with a heat-conductive layer and chemical-resistant synthetic resin inner surface for uniform heat transfer, and an optional light-reflective container to enhance heating efficiency and safety with inert gas supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If direct thermal radiation heating is used for high thermal-radiation absorption fluids, then heating efficiency is improved, but heating uniformity deteriorates
Solution Approach 1:
The patent introduces an intermediary substance (radiant-light-absorbing paint) on the tube surface that absorbs thermal radiation and converts it to heat, then transfers this heat to the fluid through the tube wall. This mediator enables efficient heating while maintaining uniform temperature distribution, resolving the contradiction between heating efficiency and uniformity.
2Use of energy by moving object
If quartz tube is used for transparent tube surrounding heating lamp, then thermal radiation transmission is improved, but chemical compatibility deteriorates
Solution Approach 1:
The patent uses a composite structure combining a chemically resistant tube material (such as PTFE or other fluororesins) with a radiant-light-absorbing paint coating. This composite approach provides both chemical compatibility with corrosive fluids like DHF and effective thermal radiation absorption, resolving the contradiction between these two requirements.
3Productivity
If metallic fins are added for heating low thermal-radiation absorption fluids, then heating effectiveness is improved, but device complexity increases
Solution Approach 1:
Instead of adding complex metallic fin structures, the patent uses radiant-light-absorbing paint as a simple intermediary coating on the tube surface. This paint enables effective heat transfer to low thermal-radiation absorption fluids without requiring additional structural components, thus improving heating effectiveness while maintaining structural simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves uniform and efficient heating of various fluids, including corrosive ones, by efficiently absorbing and distributing thermal radiation, while preventing external atmosphere penetration and ensuring safe operation.
Implementation Method 1
at least a surface, facing the heating lamp, of the tubular structure is coated with a radiant-light-absorbing paint
Implementation Method 2
the fluid flowing through the pipe is heated efficiently through the heat transfer from the pipe to the fluid
Implementation Method 3
the fluid is heated by the thermal radiation emitted from the heating lamp
Implementation Method 4
a heat-conductive layer and chemical-resistant synthetic resin inner surface for uniform heat transfer
Data Source
AI summary
Disclosed is a fluid heating apparatus including a halogen lamp 23, and a tubular structure 26 surrounding the heating lamp and having a fluid inlet 24 and a fluid outlet 25. The tubular structure 26 comprises plural straight pipes 26a arrayed circumferentially around the halogen lamp 26, with adjacent straight pipes 26a being in contact with each other, or being slightly spaced from each other. At least the surfaces, facing the halogen lamp 26, of the straight pipes 26a are coated with a black paint 27, or a radiant-light-absorbing paint.