Radiant Liquid Heating Unit With Reflection Plate Temperature Feedback
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Solution Overview
Problem
Existing liquid heating units for semiconductor and flat panel display manufacturing struggle to accurately monitor the temperature of light-transmitting materials used in heating liquids, which can lead to overheating and potential damage, especially when using halogen lamps.
Innovation Solution
A liquid heating unit design incorporating a cylindrical member made of quartz with a tetrafluoroethylene perfluoro alkyl vinyl ether copolymer (PFA) liquid pipe and a reflection plate, equipped with temperature sensors to monitor the temperature of the reflection plate and the liquid, ensuring the PFA pipe does not exceed its melting point by interrupting power to the lamp heater when necessary.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If a lamp heater is used to radiatively heat liquid, then heating efficiency is improved, but temperature monitoring of light-transmitting materials becomes difficult leading to potential overheating
Solution Approach 1:
A reflection plate is introduced as an intermediary component between the lamp heater and the liquid. The plate reflects radiant heat toward the liquid while allowing temperature sensors to monitor the plate's temperature, indirectly monitoring the heating process without interfering with the radiative heating mechanism.
Solution Approach 2:
Temperature sensors are attached to the reflection plate to provide real-time temperature feedback. This feedback mechanism allows the system to monitor temperature and control the heating process, preventing overheating while maintaining efficient radiative heating.
2Adaptability or versatility
If a PFA liquid pipe is used to heat liquid, then chemical resistance and flexibility are improved, but the pipe is vulnerable to melting at high temperatures
Solution Approach 1:
Temperature sensors are installed on the reflection plate beforehand to detect temperature rises before the PFA pipe reaches its melting point. This early warning system allows preventive action to be taken, cushioning against the harmful effect of overheating.
Solution Approach 2:
The temperature sensors provide continuous feedback on the heating process, enabling real-time monitoring and control to prevent the PFA pipe from exceeding its temperature limits while maintaining its chemical resistance advantages.
3Measurement precision
If temperature sensors are installed in the liquid tank, then temperature monitoring capability is improved, but measurement accuracy is reduced due to direct exposure to radiant heat
Solution Approach 1:
The reflection plate serves as an intermediary that the temperature sensors measure instead of directly measuring the liquid or tank. This intermediary approach allows accurate temperature monitoring without the sensors being directly exposed to harmful radiant heat from the lamp heater.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively monitors and controls the temperature of the liquid and the cylindrical member, preventing overheating and ensuring efficient heating of the liquid while protecting the PFA pipe from excessive temperatures, thus maintaining the integrity of the heating unit.
Implementation Method 1
a lamp heater configured to radiate light
Implementation Method 2
a liquid pipe placed along an outer periphery of the cylindrical member and configured to heat liquid flowing therein using the radiated light
Implementation Method 3
a reflection plate configured to cover the liquid pipe from the outside and reflect the radiated light
Data Source
AI summary
Disclosed are a liquid heating unit capable of monitoring the temperature of the liquid storage tank or pipe in which liquid is heated by transmission of the radiated light, a liquid processing apparatus including the same, and a liquid processing method. The liquid heating unit includes: a lamp heater radiating light; a cylindrical member made of material transmitting the radiated light and having a cylindrical shape in which the lamp heater is able to be inserted and penetrated into an internal space thereof; a liquid pipe placed along an outer periphery of the cylindrical member and configured to heat liquid flowing therein using the radiated light; a reflection plate that covers the liquid pipe from the outside and reflects the radiated light; and a first temperature sensor attached to an outer surface of the reflection plate.