Radiation Beam Intensity Profile Measurement Using Diffraction Structure
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Solution Overview
Problem
Current methods for determining the intensity profile of radiation beams in lithographic processes, such as the knife-edge method, require modification of the system and are not suitable for high-resolution measurements without adapting the baseline setup.
Innovation Solution
A method and apparatus using a diffraction structure that moves relative to the radiation beam, measuring diffracted radiation signals to determine the intensity profile, allowing for precise characterization of the beam's cross-sectional intensity without modifying the system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the knife-edge method is used to determine intensity profile, then measurement capability is achieved, but system modification is required and manufacturing precision requirements are strict
Solution Approach 1:
The patent introduces a diffraction structure as an intermediary element between the radiation beam and detector. This diffraction structure enables intensity profile measurement by analyzing diffracted radiation signals without requiring direct insertion of knife-edge equipment into the radiation path, thereby reducing system modification requirements while maintaining measurement capability
Solution Approach 2:
The patent replaces the mechanical knife-edge method with a diffraction-based optical measurement approach. Instead of physically blocking part of the beam with a knife-edge, the system uses diffraction of radiation by a structured element to encode intensity information, eliminating the need for precise mechanical positioning and reducing manufacturing precision requirements
2Measurement precision
If knife-edge equipment is inserted into radiation path, then intensity profile measurement is enabled, but system complexity increases
Solution Approach 1:
The diffraction structure serves as an intermediary that enables measurement without direct insertion of complex knife-edge equipment into the radiation path. The diffraction structure can be positioned at a plane where it interacts with the beam without requiring complex insertion mechanisms, thereby reducing system complexity
Solution Approach 2:
The patent uses diffraction to create an optical copy or representation of the intensity profile through the diffraction pattern. Instead of directly measuring the beam with complex equipment, the diffraction structure creates a measurable signal that encodes the intensity information, simplifying the measurement system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and non-invasive determination of the radiation beam's intensity profile, improving measurement precision and reducing the need for system modifications, suitable for high-resolution applications in lithographic processes.
Implementation Method 1
measuring, with a radiation detector, diffracted radiation signals produced from diffraction of the radiation beam by the diffraction structure
Data Source
AI summary
Methods and apparatus for determining an intensity profile of a radiation beam. The method comprises providing a diffraction structure, causing a relative movement of the diffraction structure relative to the radiation beam from a first position, wherein the radiation beam does not irradiate the diffraction structure to a second position, wherein the radiation beam irradiates the diffraction structure, measuring, with a radiation detector, diffracted radiation signals produced from a diffraction of the radiation beam by the diffraction structure as the diffraction structure transitions from the first position to the second position or vice versa, and determining an intensity profile of the radiation beam based on the measured diffracted radiation signals.