Radiation Conditioning Apparatus for Lithography Beam Segmentation
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Solution Overview
Problem
Current lithographic apparatuses face complexity and expense in providing measurement radiation for different types of measurement systems, such as topography and alignment systems, which require distinct radiation conditions.
Innovation Solution
A radiation system comprising a source and conditioning apparatus that separates and conditions a radiation beam into multiple portions with varying wavelengths, allowing for different applications, including the use of coherence removal, homogenization, and wavelength-based separation, to cater to multiple measurement systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate radiation sources are provided for different measurement systems, then measurement precision is improved, but device complexity increases
Solution Approach 1:
A single radiation source is designed to serve multiple measurement systems (topography measurement and alignment measurement) by providing broadband radiation that can be conditionally directed to different systems. The radiation source apparatus functions universally for both measurement types through the use of beam conditioning apparatus that adapts the radiation characteristics based on the target system requirements.
Solution Approach 2:
The radiation beam from the single source is segmented into different beam portions using beam conditioning apparatus. Each beam portion is independently conditioned with specific optical elements (such as homogenizers for topography measurement and coherence-preserving optics for alignment measurement) to meet the distinct requirements of different measurement systems, thereby achieving differentiated functionality from a unified source.
2Reliability
If separate radiation sources are provided for different measurement systems, then reliability is improved, but cost increases
Solution Approach 1:
The patent implements a universal radiation source that reliably serves multiple measurement systems simultaneously. By consolidating into one source with conditional beam delivery, the system reduces the number of critical components that could fail, while maintaining reliable operation for both topography and alignment measurements through dedicated beam conditioning paths.
Solution Approach 2:
Beam conditioning apparatus acts as an intermediary between the single radiation source and multiple measurement systems. This intermediary component selectively conditions and directs radiation to different systems based on their specific requirements, ensuring reliable operation for each system while avoiding the need for multiple independent sources.
3Device complexity
If a single radiation source is used for multiple measurement systems, then device complexity is reduced, but measurement precision deteriorates
Solution Approach 1:
The radiation beam is segmented into distinct beam portions with different conditioning characteristics. For topography measurement, the beam is conditioned with homogenizers to achieve uniform illumination. For alignment measurement, the beam maintains higher coherence through different optical conditioning. This segmentation allows each measurement system to receive optimally conditioned radiation from the same source.
Solution Approach 2:
Different regions or portions of the radiation beam are given different qualities through selective beam conditioning. Each beam portion is tailored with specific optical properties (coherence, uniformity, wavelength distribution) appropriate for its intended measurement system, ensuring that local quality requirements are met without compromising overall system simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies and enhances the reliability of providing radiation for various measurement systems by conditioning the beam portions differently, improving the accuracy and efficiency of topography and alignment measurements.
Implementation Method 1
the radiation conditioning apparatus is configured to separate the radiation beam into at least two beam portions
Implementation Method 2
The radiation conditioning apparatus may comprise a coherence removal apparatus configured to remove or reduce coherence from one or more of the beam portions
Data Source
AI summary
A radiation system comprising a radiation source and a radiation conditioning apparatus, wherein the radiation source is configured to provide a radiation beam with wavelengths which extend from ultraviolet to infrared, and wherein the radiation conditioning apparatus is configured to separate the radiation beam into at least two beam portions and is further configured to condition the at least two beam portions differently.