Radiation Detector Electrode Layout for High-Density CT Tiling

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Solution Overview

Problem

Direct-detection-type radiation detection elements face a decrease in resolving power when multiple elements are arranged due to increased size, leading to reduced charge collection efficiency, especially at side-surface portions of the semiconductor substrate.

Innovation Solution

A radiation detection element with a cathode electrode on the main surface and a thinner cathode electrode on the side surface, preventing the increase in size while maintaining charge collection efficiency by optimizing electrode thickness and arrangement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a cathode electrode is provided on the side surface of the single-crystal semiconductor substrate to improve charge collection efficiency, then charge collection efficiency is improved, but the size of the radiation detection element increases

Engineering Contradiction:
Improvecharge collection efficiencyVSAvoidsize of radiation detection element
Core Design Contradiction:
ReliabilityVSLength of stationary object

Solution Approach 1:

The patent applies local quality by providing a cathode electrode only on specific side surfaces (first and second side surfaces) of the single-crystal semiconductor substrate, while omitting it from other side surfaces (third and fourth side surfaces). This localized electrode arrangement improves charge collection efficiency at critical regions where electric field weakening occurs, while avoiding unnecessary size increase from electrodes on all sides. The selective placement of electrodes based on local field distribution characteristics resolves the contradiction between improving charge collection and minimizing element size.

Inventive Principle:
Principle #3Local quality

2Area of stationary object

If multiple radiation detection elements are arranged in a planar manner to increase detection area, then detection area is increased, but resolving power decreases

Engineering Contradiction:
Improvedetection areaVSAvoidresolving power
Core Design Contradiction:
Area of stationary objectVSMeasurement precision

Solution Approach 1:

The patent changes the electrode configuration parameter by selectively providing cathode electrodes on only two opposite side surfaces rather than all four side surfaces. This parameter modification allows multiple radiation detection elements to be arranged in a planar manner with reduced overall size, enabling higher element density in a given area. The optimized electrode arrangement maintains sufficient charge collection efficiency while reducing the space each element occupies, thereby preserving resolving power even as total detection area increases through multi-element arrangement.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the resolution of multiple radiation detection elements when tiled, without compromising charge collection efficiency, allowing for a higher density of elements in a given area.

Implementation Method 1

X-rays are directly incident on a single-crystal semiconductor substrate to be detected

Methodology Applied
Scientific EffectDirect detection: Photoelectric Effect

Implementation Method 2

The single-crystal semiconductor substrate converts incident radiation (such as X-rays and gamma rays) into an electric charge

Methodology Applied
Scientific EffectCharge generation: Photoelectric Effect

Implementation Method 3

The electric charge generated in the single-crystal semiconductor substrate can be collected by applying a voltage between the cathode electrode and the anode electrode to form an electric field

Methodology Applied
Scientific EffectElectric field formation: Electric Field

Implementation Method 4

X-rays are incident on a scintillator (phosphor) to be converted into visible light

Methodology Applied
Scientific EffectScintillation: Scintillation

Data Source

PatentUS20240304744A1Radiation detection element, radiation detection apparatus, x-ray CT apparatus, and manufacturing method of radiation detection element
Publication Date: 2024.09.12 CANON KK
  • US20240304744A1 patent drawing
  • US20240304744A1 patent drawing
  • US20240304744A1 patent drawing

AI summary

A radiation detection element according to the present invention includes: a single-crystal semiconductor substrate configured to convert incident radiation into an electric charge; a first cathode electrode provided on a first main surface of the single-crystal semiconductor substrate, the first cathode electrode having a first thickness; a second cathode electrode provided so as to face a side surface of the single-crystal semiconductor substrate, the second cathode electrode having a second thickness that is smaller than the first thickness; and an anode electrode provided on a second main surface of the single-crystal semiconductor substrate, the second main surface being on an opposite side of the first main surface.