Radiation Detector Guard Rings with Extended Conductive Layers

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Solution Overview

Problem

Radiation detectors face challenges in achieving high spatial resolution while maintaining efficient radiation absorption, particularly in semiconductor detectors where the conversion of radiation into electric signals is direct but can be affected by dark current and avalanche breakdown.

Innovation Solution

The use of multiple guard rings surrounding pixels in a semiconductor radiation detector, with conductive layers extending further than the doped semiconductor regions, helps reduce dark current and delay avalanche breakdown, allowing for improved radiation particle counting and energy measurement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If semiconductor radiation detectors are used for direct conversion of radiation into electric signals, then spatial resolution is improved, but dark current and avalanche breakdown affect measurement precision

Engineering Contradiction:
Improvespatial resolutionVSAvoiddark current and avalanche breakdown
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The detector is segmented into multiple functional regions including pixel regions for radiation detection and guard ring regions for electrical isolation. The guard rings are divided into multiple concentric rings with different doping types and extensions, creating distinct zones that segment the electrical fields and isolate charge carrier paths, thereby reducing dark current and preventing avalanche breakdown while maintaining spatial resolution.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Guard rings serve as intermediary structures between the pixel regions and the detector periphery. These intermediary doped regions with extended conductive layers act as buffer zones that intercept and control electrical fields, preventing direct interaction between high-field regions and peripheral structures, thus reducing dark current and avalanche effects while preserving the primary detection function.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If the conductive layer extends further than the doped semiconductor region in guard rings, then dark current is reduced and avalanche breakdown is delayed, but device complexity increases

Engineering Contradiction:
Improvedark current reduction and avalanche breakdown delayVSAvoidmultiple guard rings with different extensions
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The guard ring structure utilizes parameter changes in the form of varying conductive layer extensions across different rings. The first, second, and third guard rings have progressively different extension lengths beyond their respective doped regions, creating a gradient structure. This parameter variation optimizes electrical field distribution and charge carrier collection efficiency, reducing dark current and delaying avalanche breakdown while maintaining a systematic rather than arbitrary complexity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the detector's ability to accurately count and measure radiation particle energy by minimizing noise and increasing the stability of the electric field, thereby improving the overall performance and reliability of the radiation detection system.

Implementation Method 1

Semiconductor radiation detectors largely overcome this problem by direct conversion of radiation into electric signals. A semiconductor radiation detector may include a semiconductor layer that absorbs radiation in wavelengths of interest. When a radiation particle is absorbed in the semiconductor layer, multiple charge carriers (e.g., electrons and holes) are generated and swept under an electric field towards electric contacts on the semiconductor layer.

Methodology Applied
Scientific EffectDirect conversion of radiation into electric signals: Photoelectric Effect

Implementation Method 2

The use of multiple guard rings surrounding pixels in a semiconductor radiation detector, with conductive layers extending further than the doped semiconductor regions, helps reduce dark current and delay avalanche breakdown

Methodology Applied
Scientific EffectAvalanche breakdown: Avalanche Breakdown

Data Source

PatentEP3821278B1A radiation detector
Publication Date: 2023.10.11 SHENZHEN XPECTVISION TECH CO LTD
  • EP3821278B1 patent drawingFigure 1
  • EP3821278B1 patent drawingFigure 2A
  • EP3821278B1 patent drawingFigure 2B

AI summary

A detector has a pixel in a substrate and configured to detect radiation particles incident thereon; a first guard ring in the substrate, surrounding the pixel, and comprising a first doped semiconductor region in the substrate and a first electrically conductive layer in electrical contact to the first doped semiconductor region; a second guard ring in the substrate, surrounding the first guard ring, and comprising a second doped semiconductor region in the substrate and a second electrically conductive layer in electrical contact to the second doped semiconductor region. The first electrically conductive layer overhangs the first doped semiconductor region toward an interior of the first guard ring by a greater extent than the second electrically conductive layer overhangs the second doped semiconductor region toward an interior of the second guard ring.