Radiation Detector Pixel Layout for Charge-Induced Noise Control

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Solution Overview

Problem

Radiation detectors suffer from degradation due to retained charges in the insulating layer, leading to fluctuations in pixel output and increased dark current, which affects detection sensitivity and image quality.

Innovation Solution

The layout of signal wiring and amplification transistor is designed to avoid overlap, reducing the electric field and minimizing the influence of retained charges, thereby improving radiation resistance and detection sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If signal wiring overlaps with amplification transistor, then device complexity is reduced, but retained charges in insulating layer cause fluctuations in pixel output and increased dark current

Engineering Contradiction:
Improvelayout complexityVSAvoidpixel output stability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent resolves the layout conflict by transitioning from a two-dimensional planar arrangement to a three-dimensional stacked configuration. The signal wiring is positioned in a lower layer while the amplification transistor is placed in an upper layer, allowing both components to coexist without overlapping in the plan view. This vertical separation eliminates the harmful electric field interaction while maintaining compact device footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If signal wiring overlaps with amplification transistor, then manufacturing precision requirements are reduced, but detection sensitivity decreases due to retained charges

Engineering Contradiction:
Improvelayout precisionVSAvoiddetection sensitivity
Core Design Contradiction:
Manufacturing precisionVSMeasurement precision

Solution Approach 1:

By stacking the signal wiring and amplification transistor in different vertical layers, the patent eliminates planar overlap without requiring extremely precise lateral alignment. This approach reduces manufacturing precision demands while simultaneously improving detection sensitivity by removing the source of charge-induced noise.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If signal wiring is positioned away from amplification transistor, then radiation resistance is improved, but device area increases

Engineering Contradiction:
Improveradiation resistanceVSAvoidpixel area
Core Design Contradiction:
ReliabilityVSArea of moving object

Solution Approach 1:

The patent achieves both radiation resistance and compact area by utilizing vertical stacking. The signal wiring and amplification transistor are separated in the vertical dimension rather than the horizontal dimension, maintaining close proximity in the plan view for small pixel area while ensuring sufficient vertical separation for reduced electric field interaction and improved radiation resistance.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design enhances detection sensitivity and reduces noise, fixed pattern noise, and image persistence, enabling high-speed imaging with improved radiation resistance.

Implementation Method 1

a radiation detection element configured to convert radiation into charges

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS12442940B2Radiation detector and radiation imaging system
Publication Date: 2025.10.14 CANON KK
  • US12442940B2 patent drawing
  • US12442940B2 patent drawing
  • US12442940B2 patent drawing

AI summary

A radiation detector comprising: a pixel array in which pixels each having a radiation detection element configured to convert radiation into charges and an amplification transistor configured to amplify a signal from the radiation detection element and output the amplified signal are arrayed in a matrix shape; and signal wiring provided for each pixel column, wherein a pixel isolation structure formed to surround the radiation detection element in a plan view is provided, and the amplification transistor is arranged inside a region defined by the pixel isolation structure in a plan view.