Radiation-Inhibitive E-Fuse Structure for X-Ray Security

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Solution Overview

Problem

Conventional electrically programmable fuses (e-fuses) are insecure due to their susceptibility to non-destructive radiation imaging techniques, such as X-ray imaging, which can breach security by determining the state of the fuses without destroying the chip, compromising the security of circuit designs.

Innovation Solution

The development of electrically-programmable fuse structures with radiation inhibiting properties, incorporating an insulating layer and an electrically isolated radiation inhibitive structure positioned over the fuse link, which absorbs or blocks X-ray radiation, preventing non-destructive imaging while maintaining programmability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional e-fuse structures are used, then the device can be programmed by driving current through the fuse link, but the fuse states can be ascertained by non-destructive radiation imaging techniques such as X-ray imaging, compromising security

Engineering Contradiction:
Improveprogramming reliabilityVSAvoidX-ray imaging susceptibility
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

An insulating layer is introduced as an intermediary between the fuse link and the radiation imaging process. This insulating layer contains radiation inhibitive materials that block X-ray imaging while allowing the fuse to be programmed through the insulator, thus preventing security breaches without affecting programming functionality

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The e-fuse structure is transformed into a composite structure by incorporating radiation inhibitive materials (such as tungsten, tantalum, or lead) within the insulating layer. This composite approach provides both electrical insulation and radiation blocking capabilities, simultaneously achieving programming reliability and security protection

Inventive Principle:
Principle #40Composite materials

2Object-affected harmful factors

If an insulating layer with radiation inhibitive material is placed over the fuse link, then X-ray imaging is blocked and security is improved, but the programming process may be adversely affected

Engineering Contradiction:
ImproveX-ray imaging susceptibilityVSAvoidprogramming reliability
Core Design Contradiction:
Object-affected harmful factorsVSReliability

Solution Approach 1:

The radiation inhibitive material is distributed locally within the insulating layer rather than as a continuous barrier. This local quality approach allows X-ray blocking in specific regions while maintaining areas where electrical fields can effectively program the fuse, thus balancing security and programming reliability

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The thickness and composition of the insulating layer are optimized to specific parameter ranges that allow sufficient radiation blocking while maintaining adequate electrical field penetration for programming. By adjusting these parameters, the system achieves both security protection and programming functionality

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents non-destructive security breaches by inhibiting X-ray imaging of the e-fuse states, ensuring the security of circuit designs without adversely affecting the reliability of the programming process.

Implementation Method 1

an electrically isolated radiation inhibitive structure positioned over the fuse link... which absorbs or blocks X-ray radiation

Methodology Applied
Scientific EffectX-ray absorption: Absorption (EM radiation)

Implementation Method 2

an insulating layer overlying the elongated semiconductor material... separated from the fuse link by at least 0.2 microns of the insulating layer

Methodology Applied
Scientific EffectElectrical insulation: Dielectric

Implementation Method 3

an electrically programmable link can be programmed by driving sufficient current through the e-fuse structure, thus raising link temperature until it ruptures

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS7391097B2Secure electrically programmable fuse
Publication Date: 2008.06.24 GLOBALFOUNDRIES US INC
  • US7391097B2 patent drawing
  • US7391097B2 patent drawing
  • US7391097B2 patent drawing

AI summary

The present invention provides electrically-programmable fuse structures having radiation inhibitive properties for preventing non-destructive security breaches by radiation imaging techniques such as X-ray imaging, without adversely effecting fuse programmability, and methods of designing the same.