Radiation Shield Layout for Uniform Susceptor Heating

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Solution Overview

Problem

Cold-wall reactors experience uneven heat distribution across susceptor heater assemblies and substrates, leading to temperature differences and uneven processing results such as non-uniform film deposition or etching.

Innovation Solution

A radiation shield is introduced to mitigate heat flux variance by reflecting thermal radiation back onto the susceptor heater assembly, maintaining a uniform temperature profile using a plate with specific dimensions and attachment mechanisms that allow for easy installation and alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a susceptor heater assembly is used to heat substrates in a cold-wall reactor, then substrate temperature can be increased to facilitate surface reactions, but uneven heat distribution occurs across the susceptor and substrate surfaces leading to non-uniform processing

Engineering Contradiction:

Improvesubstrate temperatureVSAvoiduniformity of film deposition

Core Design Contradiction:

TemperatureVSManufacturing precision

Solution Approach 1:

A radiation shield is introduced as an intermediary component between the susceptor heater assembly and the reaction chamber environment. The shield reflects thermal radiation back onto the susceptor heater assembly, creating a more uniform heat distribution pattern across the substrate surface without requiring changes to the heater assembly itself or the substrate processing procedure.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Temperature

If the reaction chamber walls are not heated (cold-wall configuration), then substrate temperature control is improved, but uneven heat flux from the susceptor heater assembly causes temperature differences across the substrate

Engineering Contradiction:

Improvesubstrate temperature controlVSAvoidtemperature uniformity across substrate

Core Design Contradiction:

TemperatureVSStability of the object's composition

Solution Approach 1:

The radiation shield converts the harmful effect of uneven heat flux from the susceptor heater assembly into a beneficial effect by reflecting thermal radiation back onto the heater assembly. This reflection pattern compensates for the original uneven heat distribution, transforming the problem of non-uniform heating into a solution that enhances temperature uniformity while maintaining the cold-wall reactor configuration.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The radiation shield enhances temperature uniformity across the susceptor heater assembly and substrates, improving processing quality by reducing temperature variations and enhancing deposition, etch, or clean rates.

Implementation Method 1

A radiation shield is introduced to mitigate heat flux variance by reflecting thermal radiation back onto the susceptor heater assembly

Methodology Applied

Scientific EffectThermal radiation: Thermal Radiation

Data Source

PatentUS20260047378A1Radiation shield

Publication Date: 2026.02.12 ASM IP HLDG BV

AI summary

A radiation shield and an assembly and a reactor including the radiation shield are disclosed. The radiation shield can be used to control heat flux from a susceptor heater assembly and thereby enable better control of temperatures across a surface of a substrate placed on a surface of the susceptor heater assembly.