Radiation Source Conduit Flow to Protect Windows From Contamination
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Solution Overview
Problem
Pulsed-discharge radiation sources, such as excimer lasers, suffer from early failure due to contaminant particles accumulating in the gas chamber, which can contaminate optically sensitive components like windows, leading to unpredictable and costly downtime in high-volume production processes.
Innovation Solution
A conduit system is implemented to manage the flow of gas within the radiation source, including a refill path and conduits that circulate gas to prevent contaminants from contacting the window, thereby isolating the gas from the external environment and extending the usable lifetime of the window.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If gas is confined in a gas chamber during pulsed-discharge radiation generation, then radiation can be generated effectively, but contaminant particles accumulate and contaminate optically sensitive components like windows
Solution Approach 1:
The patent extracts the harmful contaminant particles from the gas chamber by introducing a separate evacuation port and pump system. This allows the useful gas to remain confined for radiation generation while the contaminants are selectively removed through the evacuation system, preventing window contamination without interrupting the radiation generation process.
Solution Approach 2:
The patent introduces an intermediary evacuation system that acts as a mediator between the gas chamber and the external environment. This system includes an evacuation port and pump that can selectively remove contaminants from the gas chamber without allowing them to reach the window, thus protecting the optical component while maintaining the gas confinement necessary for radiation generation.
2Reliability
If the window isolates the gas from the external environment, then the gas can be confined effectively, but the window is susceptible to contaminant contact and early failure
Solution Approach 1:
The patent removes contaminants from the gas chamber before they can contact the window by implementing an evacuation system with a dedicated port and pump. This extraction of harmful particles allows the window to maintain its isolation function without being exposed to contaminants, thereby extending its operational lifetime while preserving gas confinement reliability.
Solution Approach 2:
The evacuation system serves as an intermediary mechanism that protects the window from contaminant contact. It provides a controlled interface for removing contaminants from the gas chamber without compromising the window's sealing function, thus maintaining both gas confinement reliability and extending window service life.
3Ease of operation
If gas is circulated during radiation generation, then gas management is improved, but the flow may distribute contaminants to sensitive components
Solution Approach 1:
The patent extracts contaminants from the circulating gas flow by implementing an evacuation system that continuously or periodically removes particles from the gas chamber. This allows gas circulation to proceed for improved gas management while contaminants are selectively removed before they can be distributed to sensitive components like the window.
Solution Approach 2:
The evacuation system acts as an intermediary that decouples the beneficial gas circulation from the harmful contaminant distribution. It provides a controlled removal path for contaminants independent of the main gas circulation flow, allowing gas management to be optimized without risking contaminant transport to sensitive components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The conduit system effectively reduces the likelihood of untimely failure by managing gas flow, enhancing the reliability and average lifetime of the radiation source by minimizing contamination on sensitive components.
Implementation Method 1
Pulsed-discharge radiation sources excite gas molecules confined in a chamber to generate laser radiation of a desired wavelength. The gas molecules can be excited by supplying a voltage (e.g., an electrical pulse) to the gas via electrodes.
Implementation Method 2
The conduit system is configured to direct a flow of one of a refill gas, the gas, or the refill gas and the gas at least during a refill operation to prevent the contaminant from contacting the window
Data Source
AI summary
A pulsed-discharge radiation source includes a gas chamber, a window, and a conduit system. The conduit system includes a refill path and a conduit. The pulsed-discharge radiation source generates radiation. The gas chamber confines a gas and contaminants produced during the generation of radiation. The window isolates the gas from an environment external to the gas chamber and allows the radiation to travel between the gas chamber and the environment. The refill path allows a replacement of the gas. The conduit circulates the gas to or from the gas chamber during the generating. The conduit system directs a flow of one of a refill gas, the gas, or the refill gas and the gas at least during a refill operation to prevent the contaminant from contacting the window, whereby the conduit system increases the usable lifetime of at least the window.