Radiation Temperature Measurement for Heat Treatment

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Solution Overview

Problem

Existing heat treatment apparatuses face challenges in accurately estimating temperature profiles within process containers due to the limited number of thermocouples used and the need to open the container for installation, leading to inefficiencies and potential inaccuracies in temperature measurement.

Innovation Solution

A temperature measurement apparatus that includes a radiation temperature measurement unit to scan the surface of a rotating table in a heat treatment apparatus, allowing for the measurement of multiple temperature areas while the table is rotated, and a control unit to generate a temperature map based on these measurements, enabling precise temperature profile estimation without opening the container.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If thermocouples are attached to components in the process container to measure temperature, then temperature measurement is possible, but operation time is increased due to opening the container for installation

Engineering Contradiction:

Improvetemperature measurement capabilityVSAvoidoperation time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent replaces contact-based thermocouple measurement with non-contact infrared temperature measurement. The infrared sensor detects thermal radiation from the substrate surface without physical contact, eliminating the need to open the container for thermocouple installation while maintaining temperature measurement capability

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces infrared radiation as an intermediary to transfer temperature information from the substrate to the measurement device. The infrared sensor detects thermal radiation emitted by the substrate, allowing temperature measurement through the container wall without direct contact or container opening

Inventive Principle:

Principle #24Intermediary (Mediator)

2Device complexity

If a limited number of thermocouples are provided in the process container, then installation is simplified, but measurement accuracy deteriorates due to inability to capture complete temperature profile

Engineering Contradiction:

Improvenumber of thermocouplesVSAvoidtemperature profile accuracy

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

The patent segments the temperature measurement into multiple discrete points across the substrate surface. The infrared sensor scans different locations on the substrate to build a comprehensive temperature profile, replacing the need for multiple thermocouples with a single scanning sensor

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent transitions from point-based temperature measurement (thermocouples at specific locations) to area-based measurement by scanning the substrate surface. The infrared sensor captures temperature information across two-dimensional space, providing complete temperature distribution without requiring multiple sensors

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows for efficient and accurate estimation of temperature profiles in heat treatment apparatuses, reducing operational time and improving measurement accuracy by scanning multiple areas on a rotating table while it is in use, thus enhancing process control and efficiency.

Implementation Method 1

a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas at a surface of the rotating table in a radius direction of the rotating table by scanning the surface of the rotating table in the radius direction

Methodology Applied

Scientific EffectThermal radiation: Thermal Radiation

Data Source

PatentUS8992079B2Temperature measurement apparatus, method of estimating temperature profile, recording medium and heat treatment apparatus

Publication Date: 2015.03.31 TOKYO ELECTRON LTD

AI summary

A temperature measurement apparatus for estimating a temperature profile in a process container, includes a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas at a surface of the rotating table in a radius direction of the rotating table by scanning the surface of the rotating table in the radius direction; an operation control unit that controls to start heating of the process container by a heater while keeping the rotating table immobilized, and controls to repeat a scanning operation, in which the radiation temperature measurement unit scans the surface of the rotating table in the radius direction to obtain the temperature of the plural temperature measurement areas while the rotating table is rotated in a circumferential direction of the rotating table, after a predetermined period has passed from starting the heating of the process container.