Radiation Thermometer Broadband Light Source Wavelength Optimization
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Solution Overview
Problem
Conventional radiation thermometers face challenges in maintaining precision and signal strength when measuring heat radiation intensity, particularly due to changes in emissivity and wavelength range, which affects temperature measurement accuracy and repeatability, especially during thin film formation processes in semiconductor manufacturing.
Innovation Solution
A radiation thermometer utilizing a broadband light source and optical filter to selectively pass light within a predetermined wavelength range, allowing for precise temperature calculation using reflected and radiated light intensity, while maintaining the wavelength range for improved precision without narrowing it, thus enhancing thermometry accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a narrow wavelength range is used for measuring heat radiation intensity, then measurement precision is improved, but signal strength decreases
Solution Approach 1:
The invention changes the spectral parameters of the light source by using a broadband light source with specific emission characteristics (peak wavelength and full width at half maximum) that are optimized for the measurement wavelength range. This parameter optimization allows the system to maintain both high signal strength and high measurement precision simultaneously, resolving the contradiction between narrow bandwidth precision and broad bandwidth signal strength.
2Measurement precision
If the full width at half maximum of the light source emission spectrum is narrower than the measuring wavelength range, then precision is improved, but temperature measurement accuracy deteriorates due to insufficient signal coverage
Solution Approach 1:
The invention optimizes the spectral parameters of the broadband light source, specifically setting the full width at half maximum to be equal to or wider than the measuring wavelength range and positioning the peak wavelength appropriately within or near the measurement range. This ensures sufficient signal coverage across the entire measurement bandwidth while maintaining precision, thereby achieving both accurate temperature measurement and high thermometry precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves thermometry precision and maintains signal strength, reducing temperature measurement errors and ensuring stable control and repeatability, even with varying film thickness and temperature ranges, by using a broadband light source with an emission spectrum wider than the measuring wavelength range.
Implementation Method 1
an optical filter configured to, when the broadband light generated by the broadband light source is incident on the measuring target object, pass only light in a predetermined wavelength range of reflected light reflected by the measuring target object and heat radiation light radiated from the measuring target object
Implementation Method 2
reflected light reflected by the measuring target object
Implementation Method 3
heat radiation light radiated from the measuring target object
Data Source
AI summary
A radiation thermometer has a broadband light source which generates broadband light; an optical filter which, when the broadband light is incident on the measuring target object, passes only light in a predetermined wavelength range of reflected light and heat radiation light from a measuring target object; a light receiver which receives the light in the predetermined wavelength range through the optical filter; and a calculator which calculates a temperature of the measuring target object by using reflected light intensity and heat radiation intensity of the light in the predetermined wavelength range received by the light receiver, wherein an emission spectrum of the broadband light is a spectrum with a full width at half maximum which is equal to or wider than the predetermined wavelength range, and with light intensity increasing while a wavelength thereof becomes longer in the predetermined wavelength range.