Radiative Heating for CMP Slurry to Prevent Conduit Deformation

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Solution Overview

Problem

Conventional chemical mechanical planarization (CMP) processes face reliability issues due to direct heating of bendable conduits made of materials like plastic or polymer, leading to deformation, oxidation, peeling, or defects, which deteriorate the yield rate of semiconductor structures.

Innovation Solution

A wet chemical heating system using radiative heating units, such as infrared or microwave heaters, positioned upstream of the dispensing head to heat the CMP slurry without direct contact with the conduit, thereby avoiding reliability issues and enhancing the CMP operation's efficiency by preheating the slurry before dispensing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If direct heating of CMP slurry through the conduit is used, then heating efficiency is improved, but conduit reliability deteriorates due to deformation, oxidation, peeling, or defects

Engineering Contradiction:

Improveheating efficiencyVSAvoidconduit reliability

Core Design Contradiction:

Use of energy by moving objectVSReliability

Solution Approach 1:

The patent introduces an intermediary transparent window through which infrared radiation passes to heat the CMP slurry. The window acts as a mediator that allows thermal energy transfer without direct contact between the heating source and the conduit, thus maintaining conduit integrity while achieving efficient heating of the slurry.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces direct thermal conduction heating (mechanical contact) with infrared radiative heating. The infrared heater positioned behind the transparent window emits radiant energy that passes through the window and directly heats the CMP slurry, eliminating the need for direct thermal contact with the conduit.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Productivity

If higher slurry temperature is achieved to increase throughput rate, then productivity is improved, but conduit damage risk increases

Engineering Contradiction:

Improvethroughput rateVSAvoidconduit integrity

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The transparent window serves as an intermediary that enables high-temperature slurry heating without transferring excessive heat to the conduit. It allows infrared radiation to pass through and heat the slurry to temperatures that improve throughput rate while the window protects the conduit from direct thermal exposure that would cause deformation or defects.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

By substituting conductive heating with radiative heating through the transparent window, the system can achieve higher slurry temperatures for improved productivity without the conduit being subjected to direct high heat exposure that would compromise its integrity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If bendable conduit material is used for ease of installation, then ease of operation is improved, but thermal stability deteriorates under direct heating

Engineering Contradiction:

Improveinstallation flexibilityVSAvoidconduit thermal stability

Core Design Contradiction:

Ease of operationVSStability of the object's composition

Solution Approach 1:

The patent replaces direct thermal conduction with infrared radiative heating through a transparent window. This allows the use of bendable conduit materials for ease of installation while the radiative heating method prevents direct thermal exposure that would cause oxidation, peeling, or deformation of the flexible conduit material.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The transparent window acts as an intermediary barrier that protects the bendable conduit material from direct thermal exposure. It allows infrared radiation to pass through to heat the slurry while preventing the heat from degrading the flexible conduit material, thus maintaining both installation flexibility and thermal stability.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively improves the CMP operation's performance by maintaining the conduit's integrity and increasing the throughput rate by heating the CMP slurry to higher temperatures without inducing reliability issues, thus enhancing the yield and efficiency of the semiconductor fabrication process.

Implementation Method 1

a radiative heating element configured to heat the wet chemical in the conduit

Methodology Applied

Scientific EffectInfrared radiation: Infrared Radiation

Implementation Method 2

radiative heating units, such as infrared or microwave heaters

Methodology Applied

Scientific EffectMicrowave heating: Microwave Radiation

Data Source

PatentUS11517995B2Wet chemical heating system and a method of chemical mechanical polishing

Publication Date: 2022.12.06 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

The present disclosure provides a wet chemical heating system, including a first conduit for transporting wet chemical, a dispensing head connected to the first conduit, and a radiative heating element configured to heat the wet chemical in the first conduit and positioned at an upper stream of the dispensing head.