Wireless Radio Link for Coating Chamber Substrate Holder Control
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Solution Overview
Problem
Existing coating systems face challenges in efficiently transmitting information and control commands between the coating chamber and outside, particularly when the substrate holder is moving, and in accurately measuring and controlling substrate temperature and layer properties during the coating process, especially in complex motion scenarios like planetary gear systems.
Innovation Solution
A coating system equipped with a radio link between a first radio device connected to the substrate holder and a second radio device located outside the coating chamber, allowing for wireless transmission of data and control commands, enabling precise control of actuators and heaters, and measurement of physical variables like substrate temperature and layer thickness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a wired connection is used to transmit information between the coating chamber and outside, then reliable data transmission is achieved, but the substrate holder movement is restricted and the system complexity increases
Solution Approach 1:
The patent replaces the mechanical wired connection system with an electromagnetic radio communication system. The radio device mounted on the substrate holder transmits data wirelessly to external receiving devices, eliminating physical cables that would restrict movement. This substitution maintains reliable data transmission while fully enabling the substrate holder's rotational and positional freedom within the coating chamber.
2Measurement precision
If a stationary temperature sensor is used in the coating chamber, then the device complexity is low, but the measurement precision of substrate temperature is insufficient
Solution Approach 1:
The patent transforms the temperature measurement system from a stationary configuration to a dynamic one where the temperature sensor is mounted on the substrate holder and moves together with the substrates during coating. This dynamic positioning allows the sensor to directly measure the substrate temperature at the coating location, significantly improving measurement precision while the integrated design minimizes additional system complexity.
3Measurement precision
If indirect measurement methods are used for layer properties, then the device complexity is low, but the measurement precision and reliability are insufficient
Solution Approach 1:
The patent introduces an intermediary measurement approach by mounting optical sensors and other measurement devices directly on the substrate holder. These intermediaries enable direct measurement of layer properties such as thickness, optical characteristics, and uniformity during the coating process. The measurements are taken in-situ without requiring complex external measurement systems or indirect inference methods.
4Productivity
If the substrate holder rotates at high speed to improve productivity, then the coating efficiency increases, but the measurement and control of layer properties becomes more difficult
Solution Approach 1:
The patent implements a feedback control system where sensors mounted on the substrate holder continuously measure layer properties during high-speed rotation. The measured data is transmitted in real-time via radio communication to external control systems, which adjust coating parameters to maintain layer quality. This closed-loop feedback enables high-speed coating while preserving measurement precision and layer property control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables flexible and reliable information exchange and control, allowing for precise manipulation and measurement of substrates during coating, overcoming the limitations of wired transmission and indirect measurement methods, and supporting the production of high-quality thin layers with improved accuracy and efficiency.
Implementation Method 1
a radio device, in particular consisting of at least two radio devices, wherein at least a first radio device is connected to the substrate holder and at least a second radio device is arranged at least partially outside of the coating chamber, wherein there is a radio connection between the radio devices at least part of the time for the transmission of information
Data Source
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AI summary
The invention relates to a coating installation (2000) comprising a coating chamber (2001) and at least one substrate holder (2002) that is arranged in a displaceable manner inside the coating chamber (2001) to accommodate substrates (2003) that are to be coated. The coating installation (2000) also comprises a radio device with at least one first radio (2004) that is connected to the substrate holder (2002), and a second radio (2005) that is disposed at least partially outside the coating chamber (2001). A radio link for transmitting information is at least temporally disposed between the first (2004) and the second radio (2005).