Wireless Radio Link for Coating Chamber Measurement

The patent replaces the mechanical/wired measurement system with a wireless radio communication system. The radio device attached to the substrate holder transmits measurement data wirelessly to external receivers, eliminating the need for physical connections that constrain substrate movement. This allows substrates to move at high speeds and irregular patterns while maintaining measurement accuracy, as the wireless system can track and receive data regardless of substrate position or velocity.

The patent substitutes wired mechanical connections with wireless radio communication. The radio device on the substrate holder communicates with external receivers via radio waves, eliminating physical cables that would restrict movement. This provides both reliable data transmission and complete movement freedom for the substrate holder, allowing complex trajectories and positions without mechanical constraints.

The patent implements direct measurement on the actual substrate holder rather than using separate stationary test substrates. The radio device and measuring device are integrated on the substrate holder itself, enabling direct measurement of the layers being deposited on the actual substrates. This self-service approach eliminates the indirect measurement chain and associated inaccuracies, providing direct, calculable, and accurate layer property data from the production process itself.

The patent replaces the complex transformer system with wireless power transmission via radio frequency energy. The radio device on the substrate holder receives power wirelessly through electromagnetic coupling with external transmitters, eliminating the need for primary and secondary coils on the rotating component. This reduces device complexity significantly and removes the restriction to single rotational degree of freedom, allowing multi-axis movement and complex trajectories while maintaining continuous power supply.