Rail-Mounted Pollutant Detection for Clean Room Coverage
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Semiconductor manufacturing processes are vulnerable to external environmental pollutants, requiring effective detection and monitoring systems to prevent contamination, but existing solutions are inadequate for real-time, accurate pollutant detection and data management.
Innovation Solution
A pollutant detection device comprising a transfer device with a detection structure that includes sensors, sensor control boards, and a communication control board, integrated into a monitoring system with a router, detection data server, and user interface to provide real-time pollutant type and concentration data, enabling effective pollutant detection and data visualization in semiconductor production lines and clean rooms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a detection device is installed at multiple fixed points in a clean room, then pollutant detection coverage is improved, but device complexity and installation cost increase
Solution Approach 1:
The detection device is mounted on a transfer device that moves along a rail, transforming the detection system from static fixed-point monitoring to dynamic mobile monitoring. This allows a single device to cover multiple locations sequentially, achieving comprehensive pollutant detection coverage without installing multiple fixed devices throughout the clean room.
Solution Approach 2:
The detection device integrates multiple functions including pollutant detection, position tracking, and wireless data transmission within a single mobile unit. The transfer device serves both its original material transfer function and an additional function as a detection platform, reducing the need for separate dedicated detection infrastructure.
2Measurement precision
If real-time pollutant detection is implemented throughout the clean room, then detection accuracy is improved, but system complexity and data management burden increase
Solution Approach 1:
The detection device incorporates wireless communication capability that continuously transmits detection data and position information to an external monitoring system. This feedback mechanism enables real-time pollutant concentration monitoring and tracking without requiring complex local data processing or storage infrastructure at each detection point.
Solution Approach 2:
The patent introduces an intermediary communication system that bridges the mobile detection device and the central monitoring infrastructure. The detection device collects precise pollutant data, while the wireless communication module acts as an intermediary to transmit this data efficiently, reducing the complexity of direct integration between multiple sensors and the central system.
3Adaptability or versatility
If a mobile detection device is used instead of fixed devices, then device flexibility is improved, but detection stability and reliability may worsen
Solution Approach 1:
The detection device is mounted on a transfer device that moves along a rail, transforming the detection system from static fixed-point monitoring to dynamic mobile monitoring. This allows a single device to cover multiple locations sequentially, achieving comprehensive pollutant detection coverage without installing multiple fixed devices throughout the clean room.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables real-time detection and monitoring of pollutants, enhancing the accuracy and efficiency of pollutant identification, allowing for early detection and prevention of contamination in semiconductor production environments.
Implementation Method 1
a pump, and a gas outlet connected to the pump
Data Source
AI summary
A detection device includes a transfer device to travel along a rail while gripping a carrier, and a detection structure mounted on the carrier. The detection structure includes a collector to suck in air, a detector connected to the collector, the detector including a plurality of sensors, a plurality of sensor control boards receiving electrical signals from the plurality of sensors, the plurality of sensor control boards generating, based on the electrical signals, type data and concentration data regarding pollutants included in the air sucked in by the collector, and a communication control board connected to the plurality of sensor control boards.