Rail-Side Wafer Container Storage With Inductive Power Supply
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Solution Overview
Problem
The installation of power supply and communication equipment for article storage equipment in large semiconductor fabrication facilities is becoming increasingly difficult due to the expanding size of these facilities, necessitating a more simplified configuration.
Innovation Solution
The article storage equipment includes a storage unit with a purge unit for inert gas supply, a control unit for container identification and gas control, and a power supply unit that utilizes induced current from a power supply cable along the rail, along with a wireless communication module for simplified power and communication management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the facility size increases and article storage equipment installation area increases, then storage capacity and coverage are improved, but the difficulty of installing power supply equipment and communication equipment increases significantly
Solution Approach 1:
The patent combines power supply equipment and communication equipment into an integrated unit that is pre-assembled with the article storage equipment. This merging eliminates the need for separate installation of these systems, resolving the contradiction by maintaining ease of installation while covering larger areas through modular deployment of the integrated units.
Solution Approach 2:
The integrated equipment unit serves multiple functions simultaneously - storage, power supply, and communication - allowing a single installation to fulfill multiple requirements. This multi-functionality enables the system to scale across larger facility areas without proportionally increasing installation complexity, as each integrated unit is a self-contained solution.
2Adaptability or versatility
If power supply equipment and communication equipment are installed individually, then each component can be optimized independently, but the overall installation complexity and time increase
Solution Approach 1:
By merging power supply and communication equipment into a single integrated unit, the patent reduces installation complexity while preserving design flexibility. The integrated design allows for standardized deployment across the facility, eliminating the coordination burden of multiple separate installations while maintaining the ability to optimize each functional component during the design phase.
3Reliability
If separate power supply and communication equipment are used, then system functionality is ensured, but material requirements and labor requirements for installation increase
Solution Approach 1:
The integration of power supply and communication equipment reduces the total quantity of materials needed (fewer cables, mounting hardware, and connection components) and decreases labor requirements (single installation process instead of multiple separate installations). The merged unit maintains full system functionality while eliminating redundant materials and installation steps.
Solution Approach 2:
The multi-functional integrated unit provides both power supply and communication capabilities in a single package, reducing the overall material footprint and installation effort compared to separate equipment. This approach maintains reliable system functionality while minimizing the quantity of materials and labor required.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration simplifies the installation of power and communication systems, reduces material and labor requirements, and enables efficient inert gas management and container tracking, enhancing operational efficiency in semiconductor fabrication facilities.
Implementation Method 1
a power supply unit configured to supply a current induced from a power supply cable installed along the rail to the control unit
Data Source
AI summary
Proposed are article storage equipment in a semiconductor fabrication facility, the article storage equipment being capable of power supply with a more simplified configuration, and a logistics system of a semiconductor fabrication facility including the same. Article storage equipment in a semiconductor fabrication facility according to one aspect includes a storage unit installed around a rail that provides a travel route of a transport vehicle and configured to store a transport container in which a wafer is accommodated, a purge unit configured to supply an inert gas into the transport container, a control unit configured to identify the transport container stored in the storage unit and control the purge unit to supply the inert gas into the transport container, and a power supply unit configured to supply a current induced from a power supply cable installed along the rail to the control unit.