Rare Earth Fluoride Multilayer Coating for Halogen Plasma Corrosion
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current corrosion-resistant materials used in semiconductor and flat panel display manufacturing, such as ceramics, suffer from high costs, particle contamination, and erosion when exposed to halogen-containing corrosive gases or plasmas, leading to reduced performance and reliability due to spalling and reaction with water during washing.
Innovation Solution
A multilayer coating comprising a substrate with a rare earth fluoride layer as the outermost surface and a rare earth oxide layer with porosity less than 5% underneath, providing enhanced corrosion resistance and minimizing damage from plasma erosion and acid reactions during washing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If ceramic members (quartz, alumina, silicon nitride) are used for corrosion resistance, then corrosion resistance is improved, but particle contamination occurs due to spalling of crystal grains
Solution Approach 1:
The invention uses a composite coating structure with an inner layer of rare earth oxide and an outer layer of rare earth fluoride. This composite structure combines the corrosion resistance of the oxide layer with the low particle generation and chemical resistance of the fluoride layer, resolving the contradiction between corrosion protection and particle contamination.
Solution Approach 2:
The invention applies different materials with specific properties to different layers: the inner layer uses rare earth oxide for corrosion resistance and adhesion, while the outer layer uses rare earth fluoride for low particle generation and chemical inertness. This local differentiation of material properties solves the contradiction by assigning specific functions to specific regions.
2Reliability
If ceramic members are used to resist halogen-containing gas, then corrosion resistance is improved, but working cost increases
Solution Approach 1:
The composite coating of rare earth oxide and rare earth fluoride provides effective corrosion resistance at lower cost compared to traditional ceramic members. The rare earth-based materials offer comparable protective performance while reducing manufacturing expenses.
Solution Approach 2:
The invention changes the material composition parameters from traditional ceramics to rare earth-based compounds, which provides similar or superior corrosion resistance with reduced working cost, making the solution economically viable.
3Object-generated harmful factors
If reaction products are removed by washing with water, then contamination is reduced, but the coating layer and substrate are damaged due to acid formation
Solution Approach 1:
The outer fluoride layer acts as a sacrificial protective barrier that can be easily cleaned and regenerated. It protects the expensive substrate and inner coating layer from direct contact with water and acid formation during washing, allowing repeated cleaning cycles without damaging the underlying structures.
Solution Approach 2:
The rare earth fluoride outer layer serves as an intermediary between the reaction products and the substrate/coating system. It provides a chemically inert surface that resists acid formation and water damage during washing, mediating the interaction between cleaning agents and the underlying materials.
4Manufacturing precision
If low-pressure high-density plasma is used for finer feature size, then manufacturing precision is improved, but erosion and contamination of members increases
Solution Approach 1:
The dual-layer composite coating provides enhanced resistance to low-pressure high-density plasma erosion. The rare earth oxide inner layer offers strong adhesion and corrosion resistance, while the rare earth fluoride outer layer provides chemical inertness and low particle generation, together protecting against plasma-induced erosion and contamination.
Solution Approach 2:
The invention applies materials with specific plasma-resistant properties to the surface layer, creating a localized protective zone that withstands the harsh low-pressure plasma environment while allowing the plasma processing to continue with high precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The multilayer coating significantly reduces particle contamination and extends the lifespan of the corrosion-resistant member by maintaining its protective capabilities even after repeated washing, ensuring efficient production of high-quality products in harsh environments.
Implementation Method 1
a coating layer of rare earth fluoride providing the outermost surface... which has corrosion resistance to the corrosive gas or plasma
Implementation Method 2
a coating layer of rare earth oxide having a porosity of less than 5% disposed underneath
Data Source
AI summary
A corrosion resistant member to be exposed to a halogen-containing gas atmosphere or a halogen-containing gas plasma atmosphere, comprising a substrate and a plurality of layers deposited thereon including a layer of rare earth fluoride providing the outermost surface and a layer of rare earth oxide having a porosity of less than 5% underlying the rare earth fluoride layer.