Rare Earth Metal Nitride Under Layer for Magnetic Tunnel Junction Stability

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current memory circuits in electronic devices face challenges in achieving high performance and low power consumption while maintaining data storage capabilities, particularly in miniaturized devices, due to limitations in variable resistance elements such as magnetic tunnel junctions (MTJs) that require improved magnetic anisotropy and thermal stability.

Innovation Solution

The implementation of a semiconductor memory device with a magnetic tunnel junction structure, including a free layer with a variable magnetization direction, a pinned layer, and a tunnel barrier layer, where the under layer is made of rare earth metal nitride and a buffer layer with a hexagonal close-packed or wurtzite crystal structure, enhancing perpendicular magnetic anisotropy and thermal stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If conventional variable resistance elements are used in miniaturized devices, then device size is reduced, but magnetic anisotropy and thermal stability deteriorate

Engineering Contradiction:
Improvedevice sizeVSAvoidmagnetic anisotropy and thermal stability
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent employs a composite under layer structure consisting of a first under layer and a second under layer with different material compositions. The first under layer contains materials that provide perpendicular magnetic anisotropy, while the second under layer contains materials that enhance thermal stability. This composite structure allows the device to maintain both miniaturization benefits and improved magnetic characteristics, resolving the contradiction between small size and reliability.

Inventive Principle:
Principle #40Composite materials

2Reliability

If magnetic tunnel junction structure is implemented with rare earth metal nitride under layer, then thermal stability is improved, but device complexity increases

Engineering Contradiction:
Improvethermal stabilityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts the thermal stability function into a dedicated second under layer that is separate from the first under layer responsible for magnetic anisotropy. By dividing the functions into distinct layers, the patent achieves improved thermal stability while maintaining a manageable structural complexity through clear functional separation rather than integrating multiple functions into a single complex layer.

Inventive Principle:
Principle #2Taking out (Extraction)

3Reliability

If perpendicular magnetic anisotropy is increased for better data storage, then data storage capability is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improvedata storage capabilityVSAvoidlayer alignment precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent applies local quality by designing the first under layer with specific materials and thicknesses that locally provide the required perpendicular magnetic anisotropy at the magnetic tunnel junction interface. The second under layer is designed with different local properties to provide thermal stability. This localized functional assignment allows each layer to be optimized independently, reducing the overall manufacturing precision requirements compared to a uniformly designed structure.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves the characteristics of the variable resistance element, enhancing data storage and operational performance by increasing perpendicular magnetic anisotropy and thermal stability, thereby addressing the limitations of existing memory circuits.

Implementation Method 1

enhancing perpendicular magnetic anisotropy and thermal stability

Methodology Applied
Scientific EffectPerpendicular magnetic anisotropy: Anisotropy

Implementation Method 2

an under layer which is in contact with the free layer and includes a rare earth metal nitride

Methodology Applied
Scientific EffectMagnetic interaction: Magnetism

Implementation Method 3

a buffer layer with a hexagonal close-packed or wurtzite crystal structure, enhancing perpendicular magnetic anisotropy and thermal stability

Methodology Applied
Scientific EffectCrystal growth: Crystallisation

Data Source

PatentUS10153423B2Electronic device
Publication Date: 2018.12.11 KIOXIA CORP
  • US10153423B2 patent drawing
  • US10153423B2 patent drawing
  • US10153423B2 patent drawing

AI summary

An electronic device may include a semiconductor memory, and the semiconductor memory may include a free layer having a variable magnetization direction; a pinned layer having a pinned magnetization direction; a tunnel barrier layer interposed between the free layer and the pinned layer; and an under layer which is in contact with the free layer and includes a rare earth metal nitride.