Rare-Earth Metal Oxide RRAM Memory Device

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Solution Overview

Problem

State-of-the-art oxygen-vacancy based RRAM devices suffer from limited memory window and endurance failure due to saturation and degradation in the set-reset programming cycle, especially at low currents, resulting in a limited number of operational cycles.

Innovation Solution

Incorporating a hygroscopic rare-earth metal oxide layer with hydroxyl groups, such as Gadolinium-Oxide, and doping it with Aluminium or Silicon, along with using metals like Iridium or Platinum for electrodes to enhance oxygen scavenging and reset efficiency, allowing for improved reset switching and increased memory window and endurance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional oxide layer (TiO2, Ta2O5, HfO2) is used in oxygen-vacancy based RRAM devices, then the device structure is simple and CMOS compatible, but the memory window is limited to about 10 and endurance failure occurs after 10^8 cycles

Engineering Contradiction:
Improveendurance lifetimeVSAvoidoxide layer material complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent changes the chemical composition parameter of the oxide layer from conventional materials (TiO2, Ta2O5, HfO2) to a rare-earth metal oxide with specific hygroscopic properties. This parameter change enables the material to absorb water and form hydroxyl groups, fundamentally altering the reset mechanism from O2- ion motion to OH- group participation, thereby achieving extended endurance beyond 10^8 cycles and increased memory window.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite material system where the rare-earth metal oxide layer combines hygroscopic properties with oxygen-vacancy characteristics. The material integrates both the oxygen-scavenging capability needed for filament formation and the water-absorbing property that enables hydroxyl group formation, creating a multifunctional layer that simultaneously improves memory window and endurance while maintaining structural simplicity.

Inventive Principle:
Principle #40Composite materials

2Reliability

If the reset voltage is increased to improve oxygen-vacancy recovery, then the high resistive state saturation increases, but the memory window remains limited to about 10

Engineering Contradiction:
Improvehigh resistive state stabilityVSAvoidmemory window
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

The patent introduces hydroxyl groups (OH-) as an intermediary species in the reset process. Instead of directly relying on oxygen-vacancy recombination with oxygen ions, the hydroxyl groups act as mediators that facilitate the reset process through a different chemical mechanism. This intermediary enables more complete oxygen-vacancy recovery and achieves higher high resistive state saturation with a memory window exceeding 100, overcoming the limitation of conventional materials.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of operation

If asymmetric electrodes with different oxygen affinities are used to create oxygen-vacancy profile, then bipolar switching is improved, but degradation occurs with repeated set-reset cycles at low currents

Engineering Contradiction:
Improvebipolar switching performanceVSAvoidendurance at low current
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent changes the chemical species parameter involved in the reset process from oxygen ions (O2-) to hydroxyl groups (OH-). This parameter change fundamentally alters the reset mechanism, making it less dependent on the oxygen-vacancy gradient created by asymmetric electrodes. The hydroxyl group-based reset mechanism maintains bipolar switching performance while significantly reducing degradation at low currents, extending endurance beyond 10^8 cycles.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables a larger memory window and extended endurance lifetime at low programming currents, with improved reset efficiency and reduced degradation, maintaining high resistive and low resistive states even after multiple cycles.

Implementation Method 1

the metal oxide layer is hygroscopic and comprises hydroxyl groups (OH-)

Methodology Applied
Scientific EffectHygroscopic absorption: Absorption (physical)

Implementation Method 2

a chain of oxygen-vacancy (Vo) defects is created along such conductive filament (CF)

Methodology Applied
Scientific EffectIon migration: Diffusion

Implementation Method 3

Switching the device to the high resistive state, i.e. resetting the device, corresponds to the annihilation of these defects by the recombination of oxygen and oxygen-vacancies

Methodology Applied
Scientific EffectRecombination: Chemical Bonding

Data Source

PatentEP3249706B1A rare-earth metal oxide resistive random access non-volatile memory device
Publication Date: 2020.03.18 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • EP3249706B1 patent drawingFigure 1~2
  • EP3249706B1 patent drawingFigure 3~4
  • EP3249706B1 patent drawingFigure 5

AI summary

A Resistive Random Access Memory device (1) comprising a stack of a lower oxygen affinity bottom electrode (4), a hygroscopic solid-state dielectric layer (3), comprising hydroxyl groups, and a higher oxygen affinity top electrode (2). Preferably this hygroscopic solid-state dielectric layer (3) is a rare-earth metal oxide layer.