Rare-Earth Oxide Seal Layer for Plasma Chamber Components
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Solution Overview
Problem
In the semiconductor industry, chamber components exposed to corrosive plasma in manufacturing processes face erosion and corrosion, leading to reduced service life and increased maintenance costs due to the lack of effective plasma-resistant protective layers.
Innovation Solution
A chamber component with a dual protective layer system, where a thick plasma-resistant ceramic layer with cracks and pores is sealed by a thin, highly dense rare-earth oxide layer deposited using ion-assisted deposition (IAD) or physical vapor deposition (PVD), enhancing erosion resistance and reducing reactivity with process gases.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a thick plasma-resistant ceramic layer is used as protective coating, then erosion resistance is improved, but the layer contains cracks and pores that reduce reliability
Solution Approach 1:
The protective system is divided into two separate layers: a thick plasma-resistant ceramic layer for erosion protection and a thin dense rare-earth oxide seal layer for reliability. This segmentation allows each layer to optimize its specific function without compromising the other.
Solution Approach 2:
The thin dense seal layer is applied over the thick ceramic layer, creating a nested structure where the seal layer fills and seals the cracks and pores of the underlying ceramic layer, preventing plasma penetration while maintaining the erosion resistance of the outer layer.
2Duration of action of stationary object
If a thick protective layer is applied to extend service life, then duration of action is improved, but manufacturing complexity increases
Solution Approach 1:
The protective system is segmented into two functional layers with distinct purposes: the thick ceramic layer provides long-term erosion resistance to extend service life, while the thin seal layer provides a simple dense barrier. This segmentation extends component life without requiring complex single-layer structures.
3Reliability
If a dense protective layer is used to seal cracks and pores, then reliability is improved, but erosion resistance may be reduced
Solution Approach 1:
The dense seal layer is nested within the thicker ceramic layer structure. The seal layer (less than 50 microns) provides reliable sealing of cracks and pores, while the underlying thick ceramic layer (greater than 50 microns) provides the primary erosion resistance, combining both functions effectively.
Solution Approach 2:
Different regions of the protective system have different densities and properties: the inner seal layer is dense and non-porous for reliability, while the outer ceramic layer is thicker and optimized for erosion resistance. Each layer has localized quality optimized for its specific function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly extends the service life of chamber components, reduces maintenance and manufacturing costs, and minimizes particle defects and trace metal contamination by effectively sealing cracks and pores in the ceramic layer.
Implementation Method 1
performing ion assisted deposition (IAD) to deposit a second protective layer
Data Source
AI summary
A method of manufacturing an article comprises providing an article. An ion assisted deposition (IAD) process is performed to deposit a second protective layer over a first protective layer. The second protective layer is a plasma resistant rare earth oxide having a thickness of less than 50 microns and a porosity of less than 1%. The second protective layer seals a plurality of cracks and pores of the first protective layer.