Rare Earth Oxide Thermal Spray Coating for Plasma Erosion Resistance
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Solution Overview
Problem
Conventional thermal spray coatings do not provide sufficient plasma erosion resistance under high plasma output conditions, leading to decreased device yield and quality defects in semiconductor and liquid crystal device fabrication.
Innovation Solution
A thermal spray powder composed of rare earth oxide particles with a crushing strength of 80 MPa or greater and a bulk specific gravity to true specific gravity ratio of 0.15 or greater, preferably produced as granulated and sintered particles, is used to form a coating with enhanced plasma erosion resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional thermal spray coating is used, then the coating can be applied to members, but the plasma erosion resistance is insufficient under high plasma output conditions
Solution Approach 1:
The patent changes the material parameters of the thermal spray coating by using rare earth oxide particles with specific properties (crushing strength ≥80 MPa, bulk specific gravity to true specific gravity ratio ≥0.15) to achieve both high plasma erosion resistance and compatibility with high plasma output etching conditions
Solution Approach 2:
The patent employs composite material structure by combining rare earth oxide particles with specific physical properties to create a thermal spray coating that simultaneously provides protection against plasma erosion and maintains performance under high power density conditions
2Productivity
If high plasma output is used to shorten etching time, then productivity increases, but the thermal spray coating deteriorates due to insufficient plasma erosion resistance
Solution Approach 1:
The patent modifies the coating material parameters (using rare earth oxides with atomic numbers 39 or 59-70, specific crushing strength and specific gravity ratio) to enable the coating to withstand high plasma output conditions while maintaining high etching process speed
3Ease of manufacture
If conventional thermal spray powder is used, then the coating formation is simple, but the particle disintegration and porosity increase under high plasma etching conditions
Solution Approach 1:
The patent changes the particle parameters (crushing strength ≥80 MPa, bulk specific gravity to true specific gravity ratio ≥0.15) to prevent particle disintegration and reduce porosity while maintaining simple coating formation processes
Solution Approach 2:
The patent performs preliminary preparation of rare earth oxide particles with optimized physical properties before coating formation to ensure that the particles resist disintegration and minimize porosity during subsequent plasma etching processes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The thermal spray coating exhibits improved plasma erosion resistance, reducing the occurrence of defects and increasing device yield by suppressing particle disintegration and porosity, even under high plasma etching conditions.
Implementation Method 1
a thermal spray coating by plasma thermal spraying the above thermal spray powder
Implementation Method 2
The particles in the thermal spray powder are composed of an oxide of any of the rare earth elements
Implementation Method 3
the thermal spray coating exhibits improved plasma erosion resistance, reducing the occurrence of defects
Implementation Method 4
particles composed of an oxide of any of the rare earth elements having an atomic number of 39 or from 59 to 70
Data Source
AI summary
A thermal spray powder contains particles composed of an oxide of any of the rare earth elements having an atomic number of 39 or from 59 to 70. The crushing strength of the particles is 80 MPa or greater. The ratio of bulk specific gravity to true specific gravity of the thermal spray powder is 0.15 or greater. The particles are preferably granulated and sintered particles. The average particle size of primary particles constituting the granulated and sintered particles is preferably 6 μm or less.