Rare Earth Oxyfluoride Sintering Material for Plasma Corrosion Resistance
Solution Overview
Problem
Existing sintering materials fail to produce dense sintered bodies with sufficient resistance to both fluorine-based and chlorine-based plasmas, leading to issues like particle shedding and corrosion.
Innovation Solution
A sintering material comprising rare earth oxyfluoride granules with specific apparent tap density, particle size distribution, and X-ray diffraction patterns, optimized to produce a dense and uniform sintered body resistant to both fluorine-based and chlorine-based plasmas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of stationary object
If rare earth oxide solid spherical particles are used to make a sintered body, then the sintered body achieves high denseness, but the resistance to corrosion by chlorine-based plasma becomes insufficient
Solution Approach 1:
The invention changes the chemical composition parameter from pure rare earth oxide to rare earth oxyfluoride, and controls the particle size parameter within a specific range (D50: 1-10 μm). This parameter change enables the material to achieve both high denseness and resistance to both fluorine-based and chlorine-based plasmas simultaneously.
Solution Approach 2:
The invention uses rare earth oxyfluoride as a composite material that combines the advantages of both rare earth oxide (high denseness) and rare earth fluoride (resistance to fluorine-based plasma). The oxyfluoride composition provides comprehensive corrosion resistance against both fluorine-based and chlorine-based plasmas while maintaining high denseness.
2Reliability
If rare earth metal fluoride is used to produce a sintered body, then resistance to corrosion by fluorine-based plasma is achieved, but the sintered body becomes less dense and prone to particle shedding
Solution Approach 1:
The invention changes the chemical composition from rare earth metal fluoride to rare earth oxyfluoride and controls the particle size parameter (D50: 1-10 μm). This parameter change enables the material to achieve high denseness while maintaining resistance to fluorine-based plasma corrosion.
Solution Approach 2:
The rare earth oxyfluoride acts as a composite material that combines the fluorine-based plasma resistance of rare earth fluoride with the high denseness capability of rare earth oxide, eliminating the particle shedding issue while maintaining comprehensive corrosion resistance.
3Ease of manufacture
If conventional sintering materials are used, then the sintering process can be completed, but the resulting sintered body has insufficient resistance to both fluorine-based and chlorine-based plasmas
Solution Approach 1:
The invention changes the chemical composition parameter to rare earth oxyfluoride and controls particle size (D50: 1-10 μm), which enables the material to maintain good sintering processability while achieving comprehensive resistance to both fluorine-based and chlorine-based plasmas.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution results in a dense and uniform sintered body with enhanced resistance to corrosion by both fluorine-based and chlorine-based plasmas, reducing particle shedding and improving the sintering process efficiency.
Implementation Method 1
A sintering material comprising a granule containing a rare earth oxyfluoride (Ln-O—F), and having an apparent tap density of 1.0 to 2.5 g/cm3, a 50% cumulative volume particle diameter (D50N) of 10 to 100 μm as measured before ultrasonication by laser diffraction/scattering particle size distribution analysis, a 50% cumulative volume particle diameter (D50D) of 0.1 to 1.5 μm as measured after ultrasonication at 300 W for 15 minutes by laser diffraction/scattering particle size distribution analysis, and an X-ray diffraction pattern in which the maximum peak observed in the 2θ angle range of from 20° to 40° is assigned to a rare earth oxyfluoride of the form LnOF when analyzed by X-ray diffractometry using Cu-Kα or Cu-Kα1 rays
Data Source
AI summary
The present invention is a sintering material including a granule, the sintering material having an apparent tap density of 1.0 to 2.5 g/cm3, a 50% cumulative volume particle diameter (D50N) of 10 to 100 μm as measured before ultrasonication by laser diffraction/scattering particle size distribution analysis, a 50% cumulative volume particle diameter (D50D) of 0.1 to 1.5 μm as measured after ultrasonication at 300 W for 15 minutes by laser diffraction/scattering particle size distribution analysis, and an X-ray diffraction pattern in which the maximum peak observed in the 2θ angle range of from 20° to 40° is assigned to a rare earth oxyfluoride of the form LnOF when analyzed by X-ray diffractometry using Cu—Kα or Cu—Kα1 rays.