Rare Earth Oxyhalide Thermal Spray Coating for Plasma Erosion Resistance
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Solution Overview
Problem
Conventional thermal spray coatings for semiconductor device manufacturing equipment lack sufficient plasma erosion resistance and exhibit high porosity and brittleness, leading to particle contamination and circuit defects.
Innovation Solution
A thermal spray material comprising a rare earth element oxyhalide with a specific X-ray diffraction pattern intensity ratio, characterized by a rare earth element oxyhalide, oxide, and halide peaks, providing enhanced plasma erosion resistance and reduced porosity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional thermal spray ceramic coating materials are used, then plasma erosion resistance is improved, but porosity increases and hardness decreases
Solution Approach 1:
The invention changes the chemical composition parameters of the thermal spray material by incorporating specific rare earth element oxyhalides (such as yttrium oxyfluoride) with controlled ratios of rare earth elements, oxygen, and halogens. This compositional parameter change results in a coating that simultaneously achieves high plasma erosion resistance, low porosity, and high hardness, resolving the contradiction between erosion resistance and coating quality
Solution Approach 2:
The invention uses composite thermal spray materials comprising rare earth element oxyhalides combined with specific ratios of oxides and halides. This composite material approach allows the coating to exhibit synergistic properties where the oxyhalide component provides plasma erosion resistance while the controlled oxide and halide content maintains low porosity and high hardness, thus resolving the technical contradiction
2Object-generated harmful factors
If thermal spray coating is applied to equipment for semiconductor manufacturing, then particle contamination is reduced, but plasma erosion resistance remains insufficient
Solution Approach 1:
The invention optimizes the chemical composition parameters of the thermal spray material by precisely controlling the ratios of rare earth elements, oxygen, and halogens in the oxyhalide compound. This parameter optimization enables the coating to achieve both low particle contamination and high plasma erosion resistance, resolving the contradiction between reducing harmful particles and maintaining coating durability
3Duration of action of stationary object
If thermal spray coating provides durability, then equipment lifespan is extended, but porosity increases reducing coating quality
Solution Approach 1:
The invention changes the material composition parameters by using rare earth element oxyhalides with specific stoichiometric ratios, which enables the coating to achieve high durability through excellent plasma erosion resistance while maintaining low porosity and high hardness, thus resolving the contradiction between durability and coating quality
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The thermal spray coating demonstrates improved plasma erosion resistance, reduced particle formation, and increased hardness, effectively minimizing contamination and enhancing the durability of semiconductor device manufacturing equipment.
Implementation Method 1
a substrate surface is thermal-sprayed with particles formed with a material such as ceramic softened or melted by combustion or electrical energy
Implementation Method 2
particles formed with a material such as ceramic softened or melted by combustion or electrical energy
Implementation Method 3
members exposed to plasma of oxygen gas, halogen gases and the like are provided with a thermal spray ceramic coating with plasma erosion resistance
Data Source
AI summary
This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The thermal spray material has an X-ray diffraction pattern that shows a main peak intensity IA corresponding to the rare earth element oxyhalide, a main peak intensity IB corresponding to a rare earth element oxide and a main peak intensity IC corresponding to a rare earth element halide, satisfying a relationship [(IB+IC)/IA]<0.02.