Rare Earth Oxyhalide Mixed Crystal Thermal Spray Coating
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Solution Overview
Problem
Conventional thermal spray materials containing yttrium oxyfluoride face challenges such as fluorine volatilization, difficulty in controlling composition, and increased porosity, leading to reduced plasma erosion resistance and dusting resistance in semiconductor device fabrication equipment.
Innovation Solution
A thermal spray material comprising a mixed crystal of rare earth element oxyhalide and rare earth element halide, which inhibits oxidative decomposition and maintains a stable composition, reducing the presence of rare earth element oxide and halide, thereby enhancing plasma erosion and dusting resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional thermal spray materials containing yttrium oxyfluoride are used, then plasma erosion resistance is improved, but fluorine volatilizes during thermal spraying making it difficult to form compact coatings and control composition
Solution Approach 1:
The patent uses a composite material system consisting of rare earth element oxyhalide and rare earth element halide in specific proportions. This composite approach allows the oxyhalide to provide plasma erosion resistance while the halide component suppresses fluorine volatilization and oxidative decomposition, enabling both improved reliability and composition stability during thermal spraying.
Solution Approach 2:
The patent changes the chemical composition parameters by introducing rare earth element halide alongside oxyhalide, and by controlling the proportion of each component within specific ranges. This parameter adjustment prevents excessive fluorine loss and oxidative decomposition during thermal spraying, maintaining composition stability while preserving plasma erosion resistance.
2Reliability
If rare earth element oxyhalide is used as thermal spray material, then plasma erosion resistance is improved, but oxidative decomposition occurs during thermal spraying producing fine particles
Solution Approach 1:
The patent converts the potential harm of oxidative decomposition into a benefit by using rare earth element halide to suppress the oxidation of oxyhalide. The halide component acts as a protective agent that prevents the formation of harmful fine particles from oxidative decomposition, while the oxyhalide maintains its plasma erosion resistance function.
Solution Approach 2:
The composite material system of rare earth element oxyhalide and rare earth element halide works synergistically to prevent fine particle generation. The halide component suppresses oxidative decomposition that would otherwise produce harmful fine particles, while the oxyhalide provides plasma erosion resistance, eliminating the harmful effects while maintaining benefits.
3Ease of manufacture
If thermal spray material contains rare earth element oxide, then it is readily produced by oxidative decomposition, but it produces very fine particles that are not controlled
Solution Approach 1:
The patent applies preliminary anti-action by using rare earth element halide to prevent oxidative decomposition of the oxyhalide before it can produce uncontrolled fine particles. The halide component acts in advance to suppress oxidation reactions, preventing the formation of harmful fine particles from rare earth element oxide during the thermal spraying process.
4Reliability
If halogen element in rare earth element oxyhalide is used, then plasma erosion resistance is improved, but halogen readily volatilizes upon exposure to high-temperature thermal spraying environment
Solution Approach 1:
The patent converts the harmful volatilization of halogen into a beneficial effect by using the halide component to suppress excessive halogen loss. The rare earth element halide acts as a reservoir that releases halogen gradually, preventing both excessive volatilization and oxidative decomposition, thereby maintaining plasma erosion resistance while reducing substance loss.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution results in a compact thermal sprayed coating with improved plasma erosion resistance and dusting resistance, reducing particle generation and porosity, and maintaining the composition of the thermal spray material, even under high-temperature thermal spraying conditions.
Implementation Method 1
thermal sprayed particles containing a material such as a ceramic are sprayed, in a softened or melted state caused by combustion or electrical energy, onto the surface of a substrate
Implementation Method 2
contains a mixed crystal of a rare earth element oxyhalide and a rare earth element halide
Implementation Method 3
inhibits oxidative decomposition and maintains a stable composition
Implementation Method 4
exhibits an excellent plasma erosion resistance
Implementation Method 5
formation of a compact thermal sprayed coating
Data Source
AI summary
Provided is a thermal spray material that can form a compact thermal sprayed coating having an enhanced plasma erosion resistance. The herein disclosed art provides a thermal spray material that contains a rare earth element (RE), oxygen (O), and a halogen element (X) as constituent elements and that contains a mixed crystal of a rare earth element oxyhalide (RE-O—X) and a rare earth element halide (REX3).