Raw Material Supply Apparatus for Continuous Sublimation

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Solution Overview

Problem

Existing raw material supply systems face inefficiencies in operation rate due to limitations in storing and processing solid raw materials, particularly when the solubility of the material in solvents is low, leading to reduced storage capacity and complex flow rate control.

Innovation Solution

A raw material supply apparatus comprising a container, injection part, exhaust port, heating part, and deposition part, which dissolves or disperses a solid raw material in a solvent, vaporizes the solvent, and deposits the solid raw material, allowing for improved storage capacity and efficient sublimation of the material for processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a solid raw material is dissolved in a solvent and stored, then the storage capacity increases, but the operation rate decreases due to complex flow rate control and low solubility limitations

Engineering Contradiction:
Improvestorage capacityVSAvoidoperation rate
Core Design Contradiction:
Quantity of substanceVSProductivity

Solution Approach 1:

The system divides the raw material supply process into two separate functional units: a solution supply apparatus that stores and supplies liquid solution, and a solid raw material supply apparatus that stores and supplies solid material. This segmentation allows each unit to operate independently at optimal speeds, with the solution supply occurring at higher flow rates during filling and the solid material supply occurring at controlled rates during processing, thereby resolving the contradiction between storage capacity and operation rate.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A solution is used as an intermediary medium to transfer the solid raw material from the solution supply apparatus to the solid raw material supply apparatus. The solid material is dissolved in the solvent to form a storable solution, which can be accumulated in large quantities without the flow rate control issues of direct solid material handling. The solution acts as a buffer that decouples the storage function from the supply function, enabling high storage capacity while maintaining operational efficiency.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Quantity of substance

If the interior of the process chamber is heated to remove solvent and then heated to sublimate solid raw material, then the solid raw material is obtained, but the operation rate is reduced due to sequential heating steps

Engineering Contradiction:
Improvesolid raw material obtainedVSAvoidoperation rate
Core Design Contradiction:
Quantity of substanceVSProductivity

Solution Approach 1:

The solvent removal function and solid material sublimation function are merged into a single process chamber and executed in a continuous sequence without intermediate steps. The solution is sprayed into the process chamber, the solvent is evaporated, and the deposited solid material is immediately sublimated in the same chamber, eliminating the need for separate processing steps and equipment changes, thereby significantly improving the operation rate.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The process is designed to maintain continuous useful action by eliminating idle time between solvent removal and solid material sublimation. As soon as the solvent is removed and solid material deposits on the chamber wall, the heating continues seamlessly to sublimate the solid material. This continuous operation without interruption or equipment reconfiguration maximizes productivity while ensuring complete conversion of the solid raw material.

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus enhances the operation rate of processing apparatuses by increasing the amount of storable solid raw material per fixed volume and simplifying flow rate control, enabling continuous operation and improved processing efficiency.

Implementation Method 1

an injection part configured to spray the solution or the dispersion system to inject the solution or the dispersion system into the container

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 2

the interior of the process chamber is heated to sublimate the solid raw material

Methodology Applied
Scientific EffectSublimation: Sublimation

Data Source

PatentUS20220341038A1Raw material supply apparatus and raw material supply method
Publication Date: 2022.10.27 TOKYO ELECTRON LTD
  • US20220341038A1 patent drawing
  • US20220341038A1 patent drawing
  • US20220341038A1 patent drawing

AI summary

A raw material supply apparatus includes: a container configured to store a solution obtained by dissolving a first solid raw material in a solvent or a dispersion system obtained by dispersing the first solid raw material in a dispersion medium; an injection part configured to spray the solution or the dispersion system to inject the solution or the dispersion system into the container; an exhaust port configured to exhaust an inside of the container; a heating part configured to heat a second solid raw material formed by removing the solvent or the dispersion medium from the solution or the dispersion system; and a deposition part provided between the injection part and the exhaust port in the container and configured to deposit the second solid raw material.