Raw Material Supply Control for Continuous Gas Generation

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing systems face challenges in controlling the amount of solution or dispersion stored in storage parts, particularly in the heating process of solid raw materials, which affects the production of reactive gases for film formation processes.

Innovation Solution

A raw material supply system with a first storage part, detection part, and heating part to manage the amount of solution or dispersion, ensuring controlled delivery and heating to form a second solid raw material for gas production, using float sensors and control devices to regulate valve operations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the amount of solution or dispersion stored in the storage part is not controlled, then the continuous operation performance and operating rates improve, but the system complexity and control difficulty increase

Engineering Contradiction:
Improvecontinuous operation performanceVSAvoidsystem complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The detection part monitors the amount of solution or dispersion in the first storage part in advance before it becomes insufficient. This preliminary detection enables proactive replenishment operations, ensuring continuous supply to the second storage part without interruption to the heating process, thereby maintaining high productivity while using simple control logic.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The detection part provides feedback information about the amount of solution or dispersion in the first storage part to the control system. This feedback mechanism enables automatic control of the replenishment process, where the system adjusts its operation based on real-time inventory levels, achieving both high productivity and controlled complexity through intelligent automation.

Inventive Principle:
Principle #23Feedback

2Device complexity

If manual monitoring and replenishment of solution amounts is used, then the system complexity is reduced, but the operating rates and productivity decrease

Engineering Contradiction:
Improvesystem simplicityVSAvoidoperating rates
Core Design Contradiction:
Device complexityVSProductivity

Solution Approach 1:

The system performs self-monitoring and self-replenishment through the detection part that automatically tracks solution amounts and triggers replenishment when needed. This self-service capability eliminates the need for manual intervention, allowing the system to maintain high operating rates continuously while keeping the control mechanism simple and reliable.

Inventive Principle:
Principle #25Self-service

3Use of energy by moving object

If the first storage part is not adequately filled with solution or dispersion, then the heating process efficiency improves, but the continuous operation is interrupted and productivity decreases

Engineering Contradiction:
Improveheating process efficiencyVSAvoidcontinuous operation
Core Design Contradiction:
Use of energy by moving objectVSProductivity

Solution Approach 1:

The detection part monitors solution levels in the first storage part in advance and triggers replenishment before the solution becomes insufficient. This ensures the heating part always has adequate material to process, maintaining continuous operation and high productivity while allowing the heating process itself to operate at optimal efficiency without interruption.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise control of solution amounts, improving continuous operation performance and operating rates of processing apparatuses by automating raw material replenishment and expanding temperature ranges for heating without relying on specific level sensors.

Implementation Method 1

the processing chamber is heated to sublimate the solid raw material and to produce a corresponding gas

Methodology Applied
Scientific EffectSublimation: Sublimation

Implementation Method 2

using float sensors and control devices to regulate valve operations

Methodology Applied
Scientific EffectFloat sensor detection: Archimedes' Principle (Buoyancy)

Implementation Method 3

the interior of the processing chamber is heated to remove the solvent so that a solid raw material remains

Methodology Applied
Scientific EffectEvaporation: Evaporation

Data Source

PatentUS12540390B2Raw material supply system
Publication Date: 2026.02.03 TOKYO ELECTRON LTD
  • US12540390B2 patent drawing
  • US12540390B2 patent drawing
  • US12540390B2 patent drawing

AI summary

A raw material supply system includes: a first storage part configured to store a solution obtained by dissolving a first solid raw material in a solvent or a dispersion obtained by dispersing the first solid raw material in the solvent; a second storage part configured to store the solution or the dispersion transported from the first storage part; a detection part configured to detect an amount of the solution or the dispersion stored in the first storage part; and a heating part configured to heat a second solid raw material formed by removing the solvent from the solution or the dispersion stored in the second storage part.