Raw Material Supply Device Segmentation for Stable Gas

Solution Overview

Problem

Existing raw material supply systems experience fluctuations in the sublimation of solid raw materials, leading to unstable reactive gas supply and operational inefficiencies due to solvent removal and sublimation processes.

Innovation Solution

A raw material supply device with a container, injector, exhaust port, and filter partitions the interior into regions to control the sublimation process, using a solution or dispersion to generate reactive gas, and includes a control device to manage valve operations for stable gas supply and continuous operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a solid raw material is dissolved in a solvent and sprayed into a processing chamber followed by heating to remove solvent and sublimate the solid raw material, then reactive gas is generated, but fluctuation in the amount of sublimation occurs leading to unstable reactive gas supply

Engineering Contradiction:

Improvestability of reactive gas supplyVSAvoidfluctuation in sublimation amount

Core Design Contradiction:

ReliabilityVSStability of the object's composition

Solution Approach 1:

The container is divided into a storage chamber for holding the solution and a sublimation chamber for generating reactive gas, separated by a partition wall with a through-hole. This segmentation allows independent control of solvent evaporation and raw material sublimation processes, preventing fluctuation in sublimation amount and ensuring stable reactive gas supply.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

A partition wall with a through-hole acts as an intermediary structure between the storage chamber and sublimation chamber. The through-hole serves as a controlled passage for the carrier gas and sublimated raw material, regulating the transfer process and maintaining stable reactive gas generation without direct exposure to solvent evaporation fluctuations.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Quantity of substance

If the interior of the processing chamber is heated to remove solvent and then heated to sublimate solid raw material, then reactive gas is generated, but the process is time-consuming and reduces productivity

Engineering Contradiction:

Improvereactive gas generationVSAvoidprocessing time

Core Design Contradiction:

Quantity of substanceVSProductivity

Solution Approach 1:

The container is divided into a storage chamber for holding the solution and a sublimation chamber for generating reactive gas, separated by a partition wall with a through-hole. This segmentation allows independent control of solvent evaporation and raw material sublimation processes, preventing fluctuation in sublimation amount and ensuring stable reactive gas generation.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The solution is injected into the storage chamber in advance, and the carrier gas is circulated through the through-hole before and during the sublimation process. This preliminary preparation ensures that when heating begins, the system is already configured for efficient solvent removal and raw material sublimation, reducing overall processing time.

Inventive Principle:

Principle #10Preliminary action

3Reliability

If a filter is provided in the container to partition the interior into multiple regions, then fluctuation in sublimation is suppressed, but device complexity increases

Engineering Contradiction:

Improvestability of sublimation processVSAvoidcontainer structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The container is divided into a storage chamber for holding the solution and a sublimation chamber for generating reactive gas, separated by a partition wall with a through-hole. This segmentation allows independent control of solvent evaporation and raw material sublimation processes, preventing fluctuation in sublimation amount and ensuring stable reactive gas generation.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The partition wall is designed with a through-hole at a specific location and size to create localized gas flow control. This local structural feature provides the necessary separation function without requiring a complex filter system throughout the entire container, maintaining simplicity while achieving stable sublimation.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively suppresses fluctuations in sublimation, ensuring a stable reactive gas supply and improving the continuous operation capability of processing apparatuses by automatically replenishing raw materials and maintaining a consistent sublimation process.

Implementation Method 1

a filter provided in the container and configured to partition the interior of the container into a plurality of regions including a first region in which the injector is provided and a second region in which the exhaust port is provided

Methodology Applied

Scientific EffectPhysical partitioning: Filter (physical)

Implementation Method 2

an exhaust port configured to evacuate an interior of the container

Methodology Applied

Scientific EffectEvacuation: Vacuum

Implementation Method 3

a container configured to store the solution or the dispersion

Methodology Applied

Scientific EffectStorage:

Implementation Method 4

an injector configured to inject the solution or the dispersion into the container

Methodology Applied

Scientific EffectInjection: Injector

Data Source

PatentUS20230311023A1Raw material supply device and raw material supply method

Publication Date: 2023.10.05 TOKYO ELECTRON LTD

AI summary

A raw material supply device according to an embodiment of the present disclosure generates a reactive gas from a solution obtained by dissolving a solid raw material in a solvent or a dispersion obtained by dispersing the solid raw material in a dispersion medium. The raw material supply device includes: a container configured to store the solution or the dispersion; an injector configured to inject the solution or the dispersion into the container; an exhaust port configured to evacuate an interior of the container; and a filter provided in the container and configured to partition the interior of the container into a plurality of regions including a first region in which the injector is provided and a second region in which the exhaust port is provided.