RBF Network Excursion Classification Using Hyper-Cubes

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Solution Overview

Problem

Radial Basis Function (RBF) networks in artificial neural systems face increasing errors with higher dimensions, leading to false negatives and false positives in distinguishing normal and abnormal system operations, particularly in sensor data analysis from semi-conductor processing equipment.

Innovation Solution

The solution involves creating a system that uses RBF networks in conjunction with hyper-cube and hyper-sphere analysis, where nodes are expanded by increasing their radii, and samples are classified based on their residence within these geometric structures, allowing for more accurate classification with confidence estimation and minimizing errors by adding additional nodes along relevant axes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If RBF networks are used to analyze sensor data from semi-conductor processing equipment, then the system can differentiate between normal and abnormal operations, but errors increase with increasing numbers of dimensions (sensors)

Engineering Contradiction:
Improveclassification accuracyVSAvoidnumber of dimensions
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent transforms the high-dimensional sensor data into a lower-dimensional feature space by extracting key features and patterns from the raw sensor readings. This dimensionality reduction allows the RBF network to maintain classification accuracy while reducing the impact of the curse of dimensionality, thereby resolving the contradiction between measurement precision and device complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent extracts relevant features and patterns from the high-dimensional sensor data, separating the essential information from the redundant or noisy dimensions. By taking out only the critical features needed for classification, the system maintains accuracy while reducing the effective dimensionality that causes error increase in RBF networks.

Inventive Principle:
Principle #2Taking out (Extraction)

2Ease of operation

If RBF networks differentiate only between normal and abnormal values, then the analysis is simple, but false negatives increase and reduce reliability

Engineering Contradiction:
Improveanalysis simplicityVSAvoidfalse negative rate
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent segments the classification task into multiple stages: initial normal/abnormal differentiation by the RBF network, followed by secondary verification steps and confidence assessment. This segmentation allows the system to maintain operational simplicity while reducing false negatives through multi-layered validation, thereby improving reliability without sacrificing ease of operation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements feedback mechanisms where classification results are continuously evaluated and refined. False negatives are detected through confidence scoring and verification processes, with the system learning from these errors to improve future classifications. This feedback loop maintains simplicity while significantly reducing false negative rates.

Inventive Principle:
Principle #23Feedback

Data Source

PatentUS9852371B2Using radial basis function networks and hyper-cubes for excursion classification in semi-conductor processing equipment
Publication Date: 2017.12.26 APPLIED MATERIALS INC
  • US9852371B2 patent drawing
  • US9852371B2 patent drawing
  • US9852371B2 patent drawing

AI summary

A method and system for analysis of data, including creating a first node, determining a first hyper-cube for the first node, determining whether a sample resides within the first hyper-cube. If the sample does not reside within the first hyper-cube, the method includes determining whether the sample resides within a first hyper-sphere, wherein the first hyper-sphere has a radius equal to a diagonal of the first hyper-cube.