Resonant Cavity LED Planarization for Uniform Light Emission

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Solution Overview

Problem

Existing resonant cavity light-emitting diodes (RCLEDs) suffer from poor light-emitting uniformity due to variations in light-emitting wavelengths at different positions within the optoelectronic device.

Innovation Solution

A preparation method for a resonant cavity light-emitting diode that involves forming a first mirror and a first semiconductor layer on a substrate, followed by the formation of an active layer and a second semiconductor layer with a second mirror. The method includes planarizing at least one of the contact surfaces between the semiconductor layers and mirrors to ensure uniformity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional preparation method without planarization is used, then manufacturing process is simple, but light-emitting uniformity is poor

Engineering Contradiction:
Improvelight-emitting uniformityVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by performing planarization on the contact surfaces between semiconductor layers and mirrors before final assembly. This pre-treatment ensures uniform cavity length from the outset, preventing light-emitting uniformity issues before they occur, rather than attempting to correct them after device fabrication.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent changes the physical state and geometry parameters of the contact surfaces through planarization processing. By modifying the surface topology from non-uniform to uniform, the cavity length parameter becomes consistent across different positions, directly improving light-emitting uniformity while adding a controlled processing step.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If planarization is performed on contact surfaces, then cavity length uniformity is improved, but manufacturing process becomes more complex

Engineering Contradiction:
Improvecavity length uniformityVSAvoidmanufacturing ease
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The planarization is performed as a preliminary step before final device assembly. By addressing the surface uniformity issue early in the manufacturing sequence, the patent prevents cascading quality issues in subsequent processing steps, making the overall manufacturing more reliable despite the added complexity.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent introduces a controlled parameter change through planarization that targets the critical cavity length uniformity parameter. This focused modification of surface geometry parameters achieves the desired precision improvement with a single dedicated processing step rather than requiring multiple iterations or complex adjustments later.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS12349506B2Preparation method for resonant cavity light-emitting diode
Publication Date: 2025.07.01 ENKRIS SEMICON
  • US12349506B2 patent drawing
  • US12349506B2 patent drawing
  • US12349506B2 patent drawing

AI summary

A preparation method for a resonant cavity light-emitting diode comprises: forming a first mirror and a first semiconductor layer on a substrate in sequence; forming an active layer on the first semiconductor layer; and forming a second semiconductor layer and a second mirror on the active layer in sequence. The preparation method further comprises: planarizing at least one of a first contact surface between the first semiconductor layer and the first mirror, and a second contact surface between the second semiconductor layer and the second mirror. Since the first contact surface between the first semiconductor layer and the first mirror, and/or the second contact surface between the second semiconductor layer and the second mirror is planarized, the light emission uniformity of the resonant cavity light-emitting diode can be improved.