RDL and Micro-Bump Filter Capacitor for IC Area Reduction

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Integrated circuit filters and capacitors occupy large chip areas and have limited performance, necessitating the development of more efficient designs that can enhance performance while minimizing chip area usage.

Innovation Solution

The implementation of a filter and capacitor design utilizing a redistribution layer (RDL) and micro-bump layer, which includes a micro-bump line connected to the RDL, allowing for thicker metal layers that reduce resistance and parasitic capacitance, thereby improving performance without increasing chip area usage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional filter and capacitor designs are used in integrated circuits, then the chip area is occupied, but the performance is limited

Engineering Contradiction:
ImproveperformanceVSAvoidchip area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent utilizes the vertical dimension by employing multiple metal layers (M1, M2, M3, M4) stacked above each other to form filter and capacitor structures. This multi-layer approach allows the circuit elements to be built in three-dimensional space rather than confined to a single plane, effectively increasing the functional volume without proportionally increasing the chip footprint area

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements nested structures where capacitor plates are formed within the same metal layer structure used for interconnects. Specifically, adjacent metal lines in the same layer or adjacent layers are configured to serve dual purposes as both signal interconnects and capacitor electrodes, creating a nested functional arrangement that maximizes space utilization

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If thicker metal layers are used to reduce resistance and parasitic capacitance, then performance improves, but chip area may increase

Engineering Contradiction:
ImproveperformanceVSAvoidchip area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent achieves thicker effective metal paths by stacking multiple metal layers vertically. The current can flow through multiple thin layers in series, creating an equivalent of a thicker conductive path without requiring wider traces in the lateral plane. This maintains or improves performance while preserving chip area

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs composite conductor structures formed by stacking different metal layers (M1-M4) with varying thicknesses and materials. This composite approach allows optimization of electrical properties (reducing resistance and parasitic capacitance) through the vertical stacking of conductive layers rather than requiring single thick layers that would consume more lateral space

Inventive Principle:
Principle #40Composite materials

Data Source

PatentUS11410952B2Filter and capacitor using redistribution layer and micro bump layer
Publication Date: 2022.08.09 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11410952B2 patent drawing
  • US11410952B2 patent drawing
  • US11410952B2 patent drawing

AI summary

An integrated circuit package includes a die. An electrically conductive layer comprises a redistribution layer (RDL) in the die, or a micro-bump layer above the die, or both. The micro bump layer comprises at least one micro-bump line. A filter comprises the electrically conductive layer. A capacitor comprises an electrode formed in the electrically conductive layer.