Lightened Reaction Absorber Ball Screw Vibration Control
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Solution Overview
Problem
Existing semiconductor manufacturing systems face challenges in reducing vibration during high-speed operations, leading to reduced precision and increased energy consumption due to the need for counterweights that increase the overall weight of the reaction absorber.
Innovation Solution
A lightened reaction absorber is designed with a base, a support, a power source, a load unit, and a counter mechanism using aligned ball screws with different lead threads to generate a reactive force, allowing for vibration reduction without the need for additional counter mass, thereby reducing the system's weight and energy consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a counterweight is added to reduce vibration, then vibration damping effect is improved, but the weight of the reaction absorber increases
Solution Approach 1:
The patent changes the parameter of the ball screw lead to create a difference between the load-side ball screw and the reaction absorber-side ball screw. This parameter difference generates a reactive force that counteracts vibration without requiring additional counterweight mass, thus reducing the weight of the reaction absorber while maintaining vibration damping effectiveness.
2Use of energy by moving object
If counter mass is increased to reduce driving energy, then energy consumption is reduced, but the weight of the reaction absorber increases
Solution Approach 1:
By changing the ball screw lead parameter to create a difference between the two ball screws, the system generates a reactive force that reduces the driving energy required for the reaction absorber without needing to increase counter mass, thereby avoiding weight increase.
3Productivity
If high speed operation is implemented to improve productivity, then productivity is improved, but vibration increases reducing precision
Solution Approach 1:
The patent creates a dynamic reaction force mechanism using ball screws with different leads. The reactive force generated by the difference in ball screw leads dynamically counteracts vibration during high-speed operation, enabling both high productivity and high positioning precision to be achieved simultaneously.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables a semiconductor assembling system with reduced processing time and enhanced productivity and quality by minimizing vibration and energy requirements, allowing for faster and more precise operations without increasing the system's weight or energy consumption.
Implementation Method 1
The load unit is moved via a first ball screw by the operation of the power source and the counter mechanism is movably supported via a second ball screw by the support
Implementation Method 2
a power source that drives the first ball screw and the second ball screw
Implementation Method 3
a second ball screw that generates reactive force in a reverse direction to the predetermined direction
Data Source
AI summary
The present invention aims to provide a lightened reaction absorber or to provide a semiconductor assembling system with further shorter processing time and high productivity or high quality using the lightened reaction absorber. The present invention is based upon a reaction absorber provided with a counter mechanism equipped with a load unit moved in a predetermined direction by a first ball screw, a second ball screw that generates reactive force in a reverse direction to the predetermined direction and a driving unit having a driving motor that drives the first ball screw and the second ball screw, and has a characteristic of including a reaction absorbing unit with one end side equipped with a nut connected to the second ball screw and the other end side fixed to a unit base movable relatively to the counter mechanism.