Reaction Chamber Fixture for Precise Process Kit Positioning
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Solution Overview
Problem
Existing semiconductor processing systems require manual and time-consuming methods for positioning process kit components within reaction chambers, posing risks of injury and damage, and necessitate high skill levels.
Innovation Solution
A fixture system comprising a paddle member, standoff, slide member, and male threaded member is used to automate the positioning of process kit components, featuring sensors and adjustment mechanisms to ensure precise alignment and safety.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual transfer and positioning of individual piece parts is used, then positioning can be performed with simple equipment, but the process is time-consuming and requires high skill level
Solution Approach 1:
The fixture is divided into multiple functional components: a base structure with positioning features, a transfer mechanism with grippers, and a control system. This segmentation allows each component to perform its specific function efficiently while maintaining overall system manageability and reducing the complexity burden on any single element.
Solution Approach 2:
The fixture acts as an intermediary device between the operator and the reaction chamber components. It provides a standardized interface and automated transfer mechanism that mediates the positioning process, eliminating the need for manual handling while maintaining precise control over component placement.
2Reliability
If manual handling and individual transfer is used, then equipment requirements are minimal, but risk of injury and damage increases
Solution Approach 1:
The fixture incorporates self-aligning features and automated positioning mechanisms that eliminate the need for operator intervention during the critical transfer and seating operations. The system performs its own positioning function through integrated sensors and control systems, thereby eliminating safety risks associated with manual handling while maintaining operational reliability.
Solution Approach 2:
Manual mechanical handling is replaced with an automated fixture system that uses controlled mechanical movement, sensors, and computerized positioning. This substitution eliminates the safety risks of manual operations while providing more precise and consistent component placement.
3Manufacturing precision
If individual piece parts are transferred sequentially, then simple transfer mechanisms can be used, but positioning precision and registration accuracy decrease
Solution Approach 1:
The fixture pre-positions multiple piece parts in the correct sequence and orientation before transfer to the reaction chamber. Registration features and alignment mechanisms are prepared in advance, allowing for rapid and accurate placement without requiring time-consuming adjustments during the transfer process.
Solution Approach 2:
The system incorporates sensors and detection mechanisms that provide feedback on the position and orientation of piece parts during transfer. This feedback enables real-time adjustments to ensure precise registration accuracy while maintaining high positioning speed through automated correction rather than manual intervention.
Data Source
AI summary
A fixture, for example, comprised in a semiconductor processing system, includes a standoff arranged for fixation relative to a reaction chamber of a semiconductor processing system. A slide member is slidably supported by the standoff and is translatable along a carrying axis extending into the reaction chamber. A male threaded member depends from the slide member and is rotatable about a seating axis that is angled relative to the carrying axis. A paddle member depends from the male threaded member, defines along the carrying axis, is fixed relative to slide member along the carrying axis to carry a component of a process kit into the reaction chamber using translation of the slide member, and is free relative to the slide member along the seating axis to seat the process kit component within the reaction chamber using rotation of the male threaded member.