Reaction Chamber Transmittance Mapping with Movable Optical Arms

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Solution Overview

Problem

It is difficult to accurately measure the intensity and transmittance of light through large quartz reaction chambers, particularly at multiple points, due to variations in transparency at features like welds and ribs, which affect heat and radiation distribution.

Innovation Solution

An apparatus with movable arms and sensors is used to measure light intensity and transmittance through reaction chambers, employing a light source and sensor coupled to arms that move along a path to collect data, with a database to store and analyze measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional fixed measurement methods are used, then measurement setup is simple, but measurement precision is insufficient for large articles with transparency variations

Engineering Contradiction:
Improvetransmittance measurement precisionVSAvoidmeasurement apparatus complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent employs movable arms that can be positioned at multiple locations across the reaction chamber, transforming a static measurement system into a dynamic one. This allows the measurement apparatus to adapt to different measurement points on large articles, improving measurement precision while managing device complexity through controlled mobility

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The measurement system is divided into separate movable arms that can be independently positioned. Each arm carries measurement components, allowing the system to segment the measurement task across multiple locations and achieve comprehensive coverage of large articles with transparency variations

Inventive Principle:
Principle #1Segmentation

2Reliability

If multiple measurement points are measured, then measurement completeness improves, but measurement time increases

Engineering Contradiction:
Improvequality verification reliabilityVSAvoidmeasurement time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent pre-establishes multiple measurement locations and paths before actual measurement begins. The movable arms are positioned in advance at predetermined points, and measurement paths are planned beforehand, allowing efficient sequential measurement that improves reliability without excessive time loss

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The measurement system maintains continuous operation by moving arms sequentially between measurement points without interruption. The automated positioning and measurement process ensures continuous data collection across all critical locations, improving verification reliability while minimizing idle time

Inventive Principle:
Principle #20Continuity of useful action

3Manufacturing precision

If transparency variations at welds and ribs are detected, then quality control improves, but measurement difficulty increases

Engineering Contradiction:
Improvefeature dimension precisionVSAvoidtransparency variation detection difficulty
Core Design Contradiction:
Manufacturing precisionVSDifficulty of detecting and measuring

Solution Approach 1:

The patent applies measurement focus selectively at specific locations where transparency variations occur, such as welds and ribs. Rather than uniformly measuring the entire chamber, the system concentrates measurement effort at critical features, improving manufacturing precision while managing detection difficulty through targeted analysis

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The measurement system detects transparency variations by measuring light transmission changes through different regions. Areas with different transparency (such as welds and ribs) exhibit different light transmission characteristics, allowing the system to identify and measure feature dimensions based on these optical property changes

Inventive Principle:
Principle #32Color changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise measurement of light transmittance and quality verification of reaction chambers, allowing for calibration and determination of feature dimensions within acceptable tolerances.

Implementation Method 1

measure a transmittance of light from the light source through a wall of the article

Methodology Applied
Scientific EffectLight transmission: Light

Implementation Method 2

a sensor coupled to the second arm... sensor can receive light that is transmitted through the article

Methodology Applied
Scientific EffectPhotoelectric detection: Photoelectric Effect

Data Source

PatentUS12584857B2Method and apparatus for transmittance measurements of large articles
Publication Date: 2026.03.24 ASM IP HLDG BV
  • US12584857B2 patent drawing
  • US12584857B2 patent drawing
  • US12584857B2 patent drawing

AI summary

Methods and apparatus for measuring light intensity are disclosed. The methods and apparatus can be used to verify an article, such as a reaction chamber. Exemplary apparatus include a first arm, a light source coupled to the first arm, a second arm, and a sensor coupled to the second arm. The sensor can receive light from the light source that is transmitted through at least a portion of the article.