Reaction Force Counteracting Device for Metrology Tools
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Solution Overview
Problem
Conventional balance mass systems are bulky and difficult to arrange due to the need for a heavy balance mass to counteract reaction forces, which compromises stability and compactness.
Innovation Solution
A reaction force counteracting device with a base seat unit, stage mounting unit, vibration isolating assembly, movable stage unit, and a control unit that uses primary and counteraction actuating members to counteract reaction forces, reducing the need for a heavy balance mass by generating a counteraction force through linear servo motors and air bearings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a heavy balance mass is used to counteract reaction forces, then stability is improved, but device complexity and volume increase
Solution Approach 1:
The patent replaces the conventional heavy mechanical balance mass with an active control system using linear servo motors and air bearings. The control unit dynamically adjusts the counteraction actuating member to generate equal and opposite forces to neutralize reaction forces, eliminating the need for large inertial masses while maintaining stability.
Solution Approach 2:
The system changes from a static passive mass-based counteraction method to a dynamic active control method. The control unit continuously monitors position data and adjusts the counteraction force in real-time based on acceleration data, allowing lightweight components to achieve the stability previously requiring heavy masses.
2Stability of the object's composition
If a heavy balance mass is used to counteract reaction forces, then stability is improved, but the system becomes bulky
Solution Approach 1:
The patent substitutes the bulky mechanical balance mass with compact electromagnetic actuators (linear servo motors) and air bearing assemblies. These active components generate the necessary counteracting forces through controlled electromagnetic fields and aerodynamic lift, occupying significantly less volume than equivalent mass-based systems.
Solution Approach 2:
The system employs air bearings to support the stage and actuating members on air cushions, eliminating mechanical contact and reducing friction. This pneumatic support mechanism allows for lighter, more compact construction compared to traditional mechanical support structures requiring heavy balance masses.
3Stability of the object's composition
If a heavy balance mass is used to counteract reaction forces, then stability is improved, but ease of operation deteriorates
Solution Approach 1:
The control system automatically performs the counteraction function by continuously monitoring position data from sensors and adjusting the counteraction actuating member in real-time. The system self-regulates to maintain stability without requiring manual adjustment or complex mechanical arrangements, simplifying operation and installation.
Solution Approach 2:
The control unit receives real-time position data from the primary actuating member and adjusts the counteraction actuating member accordingly. This closed-loop feedback control enables the system to automatically compensate for disturbances and maintain stability, eliminating the need for complex manual arrangement and adjustment procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances stability and compactness by effectively counteracting reaction forces without significant displacement of the mounting seat, allowing for more versatile and compact arrangements.
Implementation Method 1
an air bearing assembly 31 which generates an air cushion such that the stage 32 and the holding table 34 are floatingly supported above the upper wall 212 of the mounting seat 21
Implementation Method 2
a vibration isolating assembly 22 which interconnects the mounting seat 21 and the base seat 11
Data Source
AI summary
A reaction force counteracting device includes a mounting seat supported on a base seat by means of a vibration isolating assembly, a stage movably mounted on the mounting seat and actuated by a primary actuating member, and a holding table coupled with and movable relative to the stage for holding an object. A reaction force counteracting unit includes a counteraction actuating member coupled with the primary actuating member, and a counteraction moving member actuated by the counteraction actuating member to be moved in an opposite direction relative to an accelerated displacement of the primary actuating member made by a reaction force generated from movement of the stage. A control unit is electronically connected to the primary and counteraction actuating members to control the movement of the counteraction moving member.