Reactive Gas Nozzle with Synchronized Light Source
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Solution Overview
Problem
Conventional reactive gas application apparatuses face challenges in visually recognizing the discharge of colorless reactive gas, making it difficult to ensure accurate application to the target area.
Innovation Solution
Incorporating a light source unit that emits light synchronized with plasma generation, with a focal point to guide the reactive gas application, and optionally using multiple light sources emitting different colors to enhance visibility and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If reactive gas is discharged from the nozzle, then the target object can be treated, but the reactive gas cannot be visually recognized since it is colorless
Solution Approach 1:
The patent introduces a light source unit that emits light toward the discharge path of the reactive gas. The light makes the invisible reactive gas visible by illuminating its path, allowing the operator to visually recognize where the gas is being discharged and directed toward the target object.
Solution Approach 2:
The light source unit acts as an intermediary element between the reactive gas discharge system and the operator's visual perception. By introducing this third element (light), the system enables detection of the reactive gas without altering the gas itself or the fundamental discharge mechanism.
2Measurement precision
If light source unit is added to enable visual recognition, then the reactive gas application accuracy is improved, but the device complexity increases
Solution Approach 1:
The light source unit serves multiple functions: it illuminates the reactive gas path for visibility, defines the treatment area through its emission pattern, and can potentially indicate operational status. This multi-functionality justifies the addition without proportionally increasing complexity.
Solution Approach 2:
The light source is positioned specifically to illuminate only the relevant discharge path and target area, rather than providing general illumination. This localized approach minimizes the added complexity while maximizing the benefit for application precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy and precise application of reactive gas to the target object by providing visual feedback on the discharge direction, ensuring effective treatment.
Implementation Method 1
generates reactive gas (active species) such as active oxygen or active nitrogen by plasma generated in the application instrument
Implementation Method 2
a light source unit for emitting light toward a position ahead of a tip of the nozzle
Data Source
AI summary
The present invention provides a reactive gas application apparatus capable of easily and surely applying a reactive gas to a target object. The reactive gas application apparatus (100) includes: a plasma generating unit (12), a nozzle (1) for discharging a reactive gas activated by plasma generated in the plasma generation unit (12), and a light source unit (50) for emitting light toward a position ahead of a tip of the nozzle (1). The reactive gas application apparatus preferably further includes a control unit for synchronizing plasma generation in the plasma generation unit and light emission in the light source unit.


